JPS6383756U - - Google Patents

Info

Publication number
JPS6383756U
JPS6383756U JP17758486U JP17758486U JPS6383756U JP S6383756 U JPS6383756 U JP S6383756U JP 17758486 U JP17758486 U JP 17758486U JP 17758486 U JP17758486 U JP 17758486U JP S6383756 U JPS6383756 U JP S6383756U
Authority
JP
Japan
Prior art keywords
lens barrel
parts
optical system
electron beam
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17758486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17758486U priority Critical patent/JPS6383756U/ja
Publication of JPS6383756U publication Critical patent/JPS6383756U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP17758486U 1986-11-20 1986-11-20 Pending JPS6383756U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17758486U JPS6383756U (ko) 1986-11-20 1986-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17758486U JPS6383756U (ko) 1986-11-20 1986-11-20

Publications (1)

Publication Number Publication Date
JPS6383756U true JPS6383756U (ko) 1988-06-01

Family

ID=31118920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17758486U Pending JPS6383756U (ko) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPS6383756U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012518897A (ja) * 2009-02-22 2012-08-16 マッパー・リソグラフィー・アイピー・ビー.ブイ. 荷電粒子リソグラフィ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012518897A (ja) * 2009-02-22 2012-08-16 マッパー・リソグラフィー・アイピー・ビー.ブイ. 荷電粒子リソグラフィ装置

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