JPS6383756U - - Google Patents
Info
- Publication number
- JPS6383756U JPS6383756U JP17758486U JP17758486U JPS6383756U JP S6383756 U JPS6383756 U JP S6383756U JP 17758486 U JP17758486 U JP 17758486U JP 17758486 U JP17758486 U JP 17758486U JP S6383756 U JPS6383756 U JP S6383756U
- Authority
- JP
- Japan
- Prior art keywords
- lens barrel
- parts
- optical system
- electron beam
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17758486U JPS6383756U (cs) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17758486U JPS6383756U (cs) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383756U true JPS6383756U (cs) | 1988-06-01 |
Family
ID=31118920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17758486U Pending JPS6383756U (cs) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383756U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012518897A (ja) * | 2009-02-22 | 2012-08-16 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 荷電粒子リソグラフィ装置 |
-
1986
- 1986-11-20 JP JP17758486U patent/JPS6383756U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012518897A (ja) * | 2009-02-22 | 2012-08-16 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 荷電粒子リソグラフィ装置 |