JPS6382943U - - Google Patents

Info

Publication number
JPS6382943U
JPS6382943U JP17661386U JP17661386U JPS6382943U JP S6382943 U JPS6382943 U JP S6382943U JP 17661386 U JP17661386 U JP 17661386U JP 17661386 U JP17661386 U JP 17661386U JP S6382943 U JPS6382943 U JP S6382943U
Authority
JP
Japan
Prior art keywords
sample
vacuum
sample holder
atmosphere
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17661386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17661386U priority Critical patent/JPS6382943U/ja
Publication of JPS6382943U publication Critical patent/JPS6382943U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP17661386U 1986-11-19 1986-11-19 Pending JPS6382943U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17661386U JPS6382943U (US08063081-20111122-C00044.png) 1986-11-19 1986-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17661386U JPS6382943U (US08063081-20111122-C00044.png) 1986-11-19 1986-11-19

Publications (1)

Publication Number Publication Date
JPS6382943U true JPS6382943U (US08063081-20111122-C00044.png) 1988-05-31

Family

ID=31117024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17661386U Pending JPS6382943U (US08063081-20111122-C00044.png) 1986-11-19 1986-11-19

Country Status (1)

Country Link
JP (1) JPS6382943U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013039080A1 (ja) * 2011-09-16 2015-03-26 住友重機械工業株式会社 基板製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013039080A1 (ja) * 2011-09-16 2015-03-26 住友重機械工業株式会社 基板製造装置

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