JPS6382940U - - Google Patents

Info

Publication number
JPS6382940U
JPS6382940U JP17703886U JP17703886U JPS6382940U JP S6382940 U JPS6382940 U JP S6382940U JP 17703886 U JP17703886 U JP 17703886U JP 17703886 U JP17703886 U JP 17703886U JP S6382940 U JPS6382940 U JP S6382940U
Authority
JP
Japan
Prior art keywords
wafer
die
axis direction
suction means
pick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17703886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17703886U priority Critical patent/JPS6382940U/ja
Publication of JPS6382940U publication Critical patent/JPS6382940U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP17703886U 1986-11-18 1986-11-18 Pending JPS6382940U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17703886U JPS6382940U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17703886U JPS6382940U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Publications (1)

Publication Number Publication Date
JPS6382940U true JPS6382940U (enrdf_load_stackoverflow) 1988-05-31

Family

ID=31117863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17703886U Pending JPS6382940U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Country Status (1)

Country Link
JP (1) JPS6382940U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158948A (ja) * 2007-12-04 2009-07-16 Ueno Seiki Kk ウエハリング供給排出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158948A (ja) * 2007-12-04 2009-07-16 Ueno Seiki Kk ウエハリング供給排出装置

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