JPS6381864U - - Google Patents
Info
- Publication number
- JPS6381864U JPS6381864U JP17465886U JP17465886U JPS6381864U JP S6381864 U JPS6381864 U JP S6381864U JP 17465886 U JP17465886 U JP 17465886U JP 17465886 U JP17465886 U JP 17465886U JP S6381864 U JPS6381864 U JP S6381864U
- Authority
- JP
- Japan
- Prior art keywords
- film
- film holder
- rotary lid
- rotatably arranged
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17465886U JPH0523569Y2 (https=) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17465886U JPH0523569Y2 (https=) | 1986-11-12 | 1986-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381864U true JPS6381864U (https=) | 1988-05-30 |
| JPH0523569Y2 JPH0523569Y2 (https=) | 1993-06-16 |
Family
ID=31113250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17465886U Expired - Lifetime JPH0523569Y2 (https=) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523569Y2 (https=) |
-
1986
- 1986-11-12 JP JP17465886U patent/JPH0523569Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523569Y2 (https=) | 1993-06-16 |