JPS6381864U - - Google Patents

Info

Publication number
JPS6381864U
JPS6381864U JP17465886U JP17465886U JPS6381864U JP S6381864 U JPS6381864 U JP S6381864U JP 17465886 U JP17465886 U JP 17465886U JP 17465886 U JP17465886 U JP 17465886U JP S6381864 U JPS6381864 U JP S6381864U
Authority
JP
Japan
Prior art keywords
film
film holder
rotary lid
rotatably arranged
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17465886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523569Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17465886U priority Critical patent/JPH0523569Y2/ja
Publication of JPS6381864U publication Critical patent/JPS6381864U/ja
Application granted granted Critical
Publication of JPH0523569Y2 publication Critical patent/JPH0523569Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP17465886U 1986-11-12 1986-11-12 Expired - Lifetime JPH0523569Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17465886U JPH0523569Y2 (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17465886U JPH0523569Y2 (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Publications (2)

Publication Number Publication Date
JPS6381864U true JPS6381864U (enrdf_load_stackoverflow) 1988-05-30
JPH0523569Y2 JPH0523569Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31113250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17465886U Expired - Lifetime JPH0523569Y2 (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Country Status (1)

Country Link
JP (1) JPH0523569Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0523569Y2 (enrdf_load_stackoverflow) 1993-06-16

Similar Documents

Publication Publication Date Title
JPS6381864U (enrdf_load_stackoverflow)
JPS61131787U (enrdf_load_stackoverflow)
JPS62130865U (enrdf_load_stackoverflow)
JPS6340538U (enrdf_load_stackoverflow)
JPH01146112U (enrdf_load_stackoverflow)
JPH02145990U (enrdf_load_stackoverflow)
JPS6428938U (enrdf_load_stackoverflow)
JPH01179737U (enrdf_load_stackoverflow)
JPS622833U (enrdf_load_stackoverflow)
JPH02128568U (enrdf_load_stackoverflow)
JPS6387373U (enrdf_load_stackoverflow)
JPS6360556U (enrdf_load_stackoverflow)
JPS62203000U (enrdf_load_stackoverflow)
JPS621803U (enrdf_load_stackoverflow)
JPS6349029U (enrdf_load_stackoverflow)
JPH01171931U (enrdf_load_stackoverflow)
JPS6367589U (enrdf_load_stackoverflow)
JPS63119968U (enrdf_load_stackoverflow)
JPS6333060U (enrdf_load_stackoverflow)
JPS6385597U (enrdf_load_stackoverflow)
JPS6381863U (enrdf_load_stackoverflow)
JPS62138959U (enrdf_load_stackoverflow)
JPS646418U (enrdf_load_stackoverflow)
JPS63151249U (enrdf_load_stackoverflow)
JPS63145041U (enrdf_load_stackoverflow)