JPS6381862U - - Google Patents
Info
- Publication number
- JPS6381862U JPS6381862U JP17444886U JP17444886U JPS6381862U JP S6381862 U JPS6381862 U JP S6381862U JP 17444886 U JP17444886 U JP 17444886U JP 17444886 U JP17444886 U JP 17444886U JP S6381862 U JPS6381862 U JP S6381862U
- Authority
- JP
- Japan
- Prior art keywords
- annular recess
- electromagnet
- yoke
- magnetron sputter
- sputter device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17444886U JPS6381862U (enExample) | 1986-11-13 | 1986-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17444886U JPS6381862U (enExample) | 1986-11-13 | 1986-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6381862U true JPS6381862U (enExample) | 1988-05-30 |
Family
ID=31112841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17444886U Pending JPS6381862U (enExample) | 1986-11-13 | 1986-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6381862U (enExample) |
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1986
- 1986-11-13 JP JP17444886U patent/JPS6381862U/ja active Pending