JPS6380846U - - Google Patents

Info

Publication number
JPS6380846U
JPS6380846U JP17544086U JP17544086U JPS6380846U JP S6380846 U JPS6380846 U JP S6380846U JP 17544086 U JP17544086 U JP 17544086U JP 17544086 U JP17544086 U JP 17544086U JP S6380846 U JPS6380846 U JP S6380846U
Authority
JP
Japan
Prior art keywords
suction
semiconductor wafer
suction device
heads
suctions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17544086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17544086U priority Critical patent/JPH0341469Y2/ja
Publication of JPS6380846U publication Critical patent/JPS6380846U/ja
Application granted granted Critical
Publication of JPH0341469Y2 publication Critical patent/JPH0341469Y2/ja
Expired legal-status Critical Current

Links

JP17544086U 1986-11-14 1986-11-14 Expired JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17544086U JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-14 1986-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17544086U JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-14 1986-11-14

Publications (2)

Publication Number Publication Date
JPS6380846U true JPS6380846U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-27
JPH0341469Y2 JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-30

Family

ID=31114764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17544086U Expired JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-14 1986-11-14

Country Status (1)

Country Link
JP (1) JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0341469Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-30

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