JPS638007Y2 - - Google Patents
Info
- Publication number
- JPS638007Y2 JPS638007Y2 JP9037382U JP9037382U JPS638007Y2 JP S638007 Y2 JPS638007 Y2 JP S638007Y2 JP 9037382 U JP9037382 U JP 9037382U JP 9037382 U JP9037382 U JP 9037382U JP S638007 Y2 JPS638007 Y2 JP S638007Y2
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- power supply
- supply port
- cavity resonator
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000206 photolithography Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Description
【考案の詳細な説明】
この考案はマイクロ波により無電極ランプを点
灯させるマイクロ波放電光源装置に関する。[Detailed Description of the Invention] This invention relates to a microwave discharge light source device for lighting an electrodeless lamp using microwaves.
従来、マイクロ波放電光源装置として、マイク
ロ波エネルギーをマイクロ波共振空胴内で無電極
ランプに吸収させ、ランプからの光出力の一部を
反射面を兼ねた空胴共振器本体の壁面で反射させ
るようにしたものである。 Conventionally, as a microwave discharge light source device, microwave energy is absorbed by an electrodeless lamp within a microwave resonant cavity, and a portion of the light output from the lamp is reflected by the wall of the cavity resonator body, which also serves as a reflective surface. It was designed so that
かかる構成のものは、空胴共振器本体の壁面は
光エネルギーの効率的な利用と配光を制御する目
的で正反射面に仕上げられているのが普通であ
る。しかしながら、このように壁面が正反射面
(鏡面)に仕上げられた空胴共振器本体の構造で
は第1図に示すように、マイクロ波発振器1のア
ンテナ2からマイクロ波を導波管3を介してマイ
クロ波空胴4内に導くための給電口9の部分が無
電極ランプ8からの光線10を反射できないため
に、被照射面11に陰12を形成し、写真製版分
野など均一な照度が要求される分野でのマイクロ
波放電光源装置の応用では問題となつていた。 In such a structure, the wall surface of the cavity resonator body is usually finished as a specular reflective surface for the purpose of efficient use of light energy and control of light distribution. However, in the structure of the cavity resonator body in which the wall surface is finished with a specular reflection surface (mirror surface) in this way, as shown in FIG. Since the part of the power feed port 9 that guides the waves into the microwave cavity 4 cannot reflect the light beam 10 from the electrodeless lamp 8, a shadow 12 is formed on the irradiated surface 11, and uniform illuminance is not achieved in the photolithography field. Problems have arisen in the application of microwave discharge light source devices in demanding fields.
この考案は上記欠点を除去し、均一な照度分布
が得られ、写真製版など均一な照度が要求される
分野での活用を可能にしたマイクロ波放電光源装
置を提供しようとするものである。 This invention aims to eliminate the above-mentioned drawbacks and provide a microwave discharge light source device that can obtain a uniform illuminance distribution and can be used in fields such as photolithography that require uniform illuminance.
上記の目的を達成するためこの考案では、一面
が開口した椀形の空胴共振器本体の壁面を光学的
な反射面とするとともに、この空胴共振器本体の
壁面の少なくとも給電口を含む回転対称面を拡散
反射面とし、給電口の無反射部が被照射面上に陰
をつくらないようにしたことを特徴としている。 In order to achieve the above object, this invention uses the wall surface of the bowl-shaped cavity resonator body with one side open as an optical reflecting surface, and also rotates the wall surface of the cavity resonator body at least including the power supply port. It is characterized in that the symmetrical surface is a diffuse reflection surface, and the non-reflective portion of the power feed port does not cast a shadow on the irradiated surface.
以下図面によりこの考案の一実施例につき説明
する。第2図はこの考案の一実施例を示すマイク
ロ波放電光源装置の縦断面図である。第2図にお
いて第1図と同一符号は第1図のものと同一もし
くは相当する部分を表わす。図において、5は一
面が開口した回転対称形状を成す椀形の空胴共振
器本体で、その壁面6の一部に給電口9が設けら
れ、又開口部にはその開口部を覆うように図示さ
れていない手段により固定された網体7が配設さ
れている。この網体7は、上記空胴共振器5とと
もにマイクロ波空胴4を形成し、給電口9から抽
入されたマイクロ波エネルギーを、図示されてい
ない手段にて固定された無電極ランプ8に吸収さ
せ、そこで発光した光を透過させるものである。
無電極ランプ8を中心にかなりの立体角を占める
壁面6には、給電口9を含む回転対称面に拡散反
射面6Aが、また他の部分に正反射面6Bが形成
されている。かかる構成のものにおいては、必要
とされる配光の主要部を正反射面6Bに当たる光
線13により得るとともに、これによつて全体の
反射効率を上げ、一方拡散反射面6Aより反射さ
れる反射光14は拡散反射光となるため、給電口
8の無反射部の陰を被照射面11上に与えること
ない。したがつて全体の反射効率を低下させずに
ムラの少ない照射を行なうことができる。 An embodiment of this invention will be described below with reference to the drawings. FIG. 2 is a longitudinal sectional view of a microwave discharge light source device showing an embodiment of this invention. In FIG. 2, the same reference numerals as in FIG. 1 represent the same or corresponding parts as in FIG. In the figure, reference numeral 5 denotes a bowl-shaped cavity resonator body having a rotationally symmetrical shape with one side open. A net 7 is provided which is fixed by means not shown. This net 7 forms a microwave cavity 4 together with the cavity resonator 5, and directs the microwave energy extracted from the power supply port 9 to an electrodeless lamp 8 fixed by means not shown. It absorbs light and transmits the emitted light.
The wall surface 6, which occupies a considerable solid angle around the electrodeless lamp 8, has a diffuse reflection surface 6A formed on a rotationally symmetrical surface including the power supply port 9, and a specular reflection surface 6B formed on other parts. In such a configuration, the main part of the required light distribution is obtained by the light ray 13 hitting the specular reflection surface 6B, thereby increasing the overall reflection efficiency, while reducing the amount of reflected light reflected from the diffuse reflection surface 6A. Since the light 14 becomes diffusely reflected light, the shadow of the non-reflective portion of the power supply port 8 is not cast on the irradiated surface 11. Therefore, it is possible to perform irradiation with less unevenness without reducing the overall reflection efficiency.
こゝでは一実施例として、壁面6の網体7側
で、給電口9を含む回転対称面を拡散反射面、他
の部分を正反射面としたが、給電口9の位置が異
なる場合には網体7側が正反射面、となることも
有、又、目的によつては全面を拡散反射面として
も給電口9の陰を投射することなくムラが少なく
均一な被照射面を得ることができることは言うま
でもない。 Here, as an example, on the mesh body 7 side of the wall surface 6, the rotationally symmetrical surface including the power feed port 9 is made a diffuse reflection surface, and the other part is made a specular reflection surface. However, if the position of the power feed port 9 is different, In some cases, the net body 7 side becomes a specular reflection surface, or depending on the purpose, the entire surface can be used as a diffuse reflection surface to obtain a uniform irradiated surface with little unevenness without projecting the shadow of the power supply port 9. Needless to say, it can be done.
この考案によれば、空胴共振器本体の壁面の少
なくとも給電口を含む回転対象面を拡散反射面と
したので、給電口の陰が被照射面に形成されるの
が防止でき、ムラが少なく均一な照射面が必要と
される写真製版などの分野への適用を可能にした
マイクロ波放電光源装置を提供できる。 According to this invention, since the rotation target surface including at least the power supply port on the wall surface of the cavity resonator body is made into a diffuse reflection surface, it is possible to prevent the shadow of the power supply port from forming on the irradiated surface, and to reduce unevenness. It is possible to provide a microwave discharge light source device that can be applied to fields such as photolithography that require a uniform irradiation surface.
第1図は従来のマイクロ波放電光源装置の一例
を示す主要部の縦断面図、第2図はこの考案のマ
イクロ波放電光源装置の一実施例を示す縦断面図
で、4はマイクロ波空胴、5は空胴共振器本体、
6は壁面、6Aは拡散反射面、6Bは正反射面、
7は網体、8は無電極ランプ、9は給電口であ
る。なお、各図中同一符号は同一または相当部分
を示す。
FIG. 1 is a vertical cross-sectional view of the main parts of an example of a conventional microwave discharge light source device, FIG. 5 is the cavity resonator body;
6 is a wall surface, 6A is a diffuse reflection surface, 6B is a specular reflection surface,
7 is a mesh body, 8 is an electrodeless lamp, and 9 is a power supply port. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
本体の壁面に開口する給電口と、上記空胴共振器
本体の開口部を覆うように配設された網体とで構
成されたマイクロ波空胴、このマイクロ波空胴内
に設けられた無電極ランプを備えたマイクロ波放
電光源装置において、上記空胴共振器本体の壁面
の少なくとも給電口を含む回転対称面を拡散反射
面としたことを特徴とするマイクロ波放電光源装
置。 The micro-resonator is composed of a bowl-shaped cavity resonator body with one side open, a power supply port opening on the wall of the body, and a mesh body disposed to cover the opening of the cavity resonator body. In a microwave discharge light source device equipped with a wave cavity and an electrodeless lamp provided in the microwave cavity, a rotationally symmetrical surface of the wall surface of the cavity resonator main body that includes at least the power supply port is used as a diffuse reflection surface. A microwave discharge light source device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9037382U JPS58192459U (en) | 1982-06-17 | 1982-06-17 | Microwave discharge light source device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9037382U JPS58192459U (en) | 1982-06-17 | 1982-06-17 | Microwave discharge light source device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58192459U JPS58192459U (en) | 1983-12-21 |
JPS638007Y2 true JPS638007Y2 (en) | 1988-03-09 |
Family
ID=30098892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9037382U Granted JPS58192459U (en) | 1982-06-17 | 1982-06-17 | Microwave discharge light source device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58192459U (en) |
-
1982
- 1982-06-17 JP JP9037382U patent/JPS58192459U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58192459U (en) | 1983-12-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS638007Y2 (en) | ||
JPH06204737A (en) | Dual reflecting mirror antenna system | |
JPS6331442Y2 (en) | ||
JPS6245665B2 (en) | ||
JPH0332942U (en) | ||
JPS58100353A (en) | Micro-wave electric-discharge light source device | |
JPS61176766U (en) | ||
JPS6183315U (en) | ||
JPS6481504A (en) | Offset antenna | |
JPS6237423U (en) | ||
JPS62105355A (en) | Microwave discharge light source device | |
JPH0215211Y2 (en) | ||
JPS606830Y2 (en) | lighting equipment | |
JPS63159209U (en) | ||
JPS6340802Y2 (en) | ||
JPS61156200U (en) | ||
JPH04149418A (en) | Light radiation device | |
JPH0422713U (en) | ||
JPH0520759U (en) | Phototherapy device | |
JPS53137577A (en) | High frequency lighting device | |
JPS61204399U (en) | ||
JPS6177598U (en) | ||
JPS63109936U (en) | ||
JPS6411010U (en) | ||
JPS63196510U (en) |