JPS6379639U - - Google Patents
Info
- Publication number
- JPS6379639U JPS6379639U JP17393086U JP17393086U JPS6379639U JP S6379639 U JPS6379639 U JP S6379639U JP 17393086 U JP17393086 U JP 17393086U JP 17393086 U JP17393086 U JP 17393086U JP S6379639 U JPS6379639 U JP S6379639U
- Authority
- JP
- Japan
- Prior art keywords
- passivation film
- integrated circuit
- semiconductor integrated
- circuit device
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002161 passivation Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17393086U JPS6379639U (un) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17393086U JPS6379639U (un) | 1986-11-14 | 1986-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6379639U true JPS6379639U (un) | 1988-05-26 |
Family
ID=31111854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17393086U Pending JPS6379639U (un) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6379639U (un) |
-
1986
- 1986-11-14 JP JP17393086U patent/JPS6379639U/ja active Pending