JPS6379637U - - Google Patents

Info

Publication number

JPS6379637U

JPS6379637U JP17444686U JP17444686U JPS6379637U JP S6379637 U JPS6379637 U JP S6379637U JP 17444686 U JP17444686 U JP 17444686U JP 17444686 U JP17444686 U JP 17444686U JP S6379637 U JPS6379637 U JP S6379637U

Authority

JP

Japan

Prior art keywords

mounting surface

processing

wafer mounting

container

processing container

Prior art date

1986-11-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 2
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000005273 aeration Methods 0.000 description 1