JPS6379633U - - Google Patents
Info
- Publication number
- JPS6379633U JPS6379633U JP17256886U JP17256886U JPS6379633U JP S6379633 U JPS6379633 U JP S6379633U JP 17256886 U JP17256886 U JP 17256886U JP 17256886 U JP17256886 U JP 17256886U JP S6379633 U JPS6379633 U JP S6379633U
- Authority
- JP
- Japan
- Prior art keywords
- solution
- substrate
- holder
- layer
- slide boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17256886U JPS6379633U (enExample) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17256886U JPS6379633U (enExample) | 1986-11-12 | 1986-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6379633U true JPS6379633U (enExample) | 1988-05-26 |
Family
ID=31109227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17256886U Pending JPS6379633U (enExample) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6379633U (enExample) |
-
1986
- 1986-11-12 JP JP17256886U patent/JPS6379633U/ja active Pending
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