JPS6379545U - - Google Patents

Info

Publication number
JPS6379545U
JPS6379545U JP17456186U JP17456186U JPS6379545U JP S6379545 U JPS6379545 U JP S6379545U JP 17456186 U JP17456186 U JP 17456186U JP 17456186 U JP17456186 U JP 17456186U JP S6379545 U JPS6379545 U JP S6379545U
Authority
JP
Japan
Prior art keywords
pedestal
silicon diaphragm
light
electrode
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17456186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17456186U priority Critical patent/JPS6379545U/ja
Publication of JPS6379545U publication Critical patent/JPS6379545U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP17456186U 1986-11-13 1986-11-13 Pending JPS6379545U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17456186U JPS6379545U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17456186U JPS6379545U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6379545U true JPS6379545U (enrdf_load_stackoverflow) 1988-05-26

Family

ID=31113059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17456186U Pending JPS6379545U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6379545U (enrdf_load_stackoverflow)

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