JPS6378892U - - Google Patents

Info

Publication number

JPS6378892U

JPS6378892U JP17264386U JP17264386U JPS6378892U JP S6378892 U JPS6378892 U JP S6378892U JP 17264386 U JP17264386 U JP 17264386U JP 17264386 U JP17264386 U JP 17264386U JP S6378892 U JPS6378892 U JP S6378892U

Authority

JP

Japan

Prior art keywords

argon

oxygen

heater

argon purification

rectified

Prior art date

1986-11-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• 238000007791 dehumidification Methods 0.000 claims description 2
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 6
• 229910052786 argon Inorganic materials 0.000 claims 3
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
• 239000001301 oxygen Substances 0.000 claims 2
• 229910052760 oxygen Inorganic materials 0.000 claims 2
• 238000000746 purification Methods 0.000 claims 2
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
• 238000006243 chemical reaction Methods 0.000 claims 1
• 239000001257 hydrogen Substances 0.000 claims 1
• 229910052739 hydrogen Inorganic materials 0.000 claims 1
• 238000005984 hydrogenation reaction Methods 0.000 claims 1
• 230000008929 regeneration Effects 0.000 claims 1
• 238000011069 regeneration method Methods 0.000 claims 1
• 238000000926 separation method Methods 0.000 claims 1
• 239000003054 catalyst Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1