JPS6378256U - - Google Patents
Info
- Publication number
- JPS6378256U JPS6378256U JP17123886U JP17123886U JPS6378256U JP S6378256 U JPS6378256 U JP S6378256U JP 17123886 U JP17123886 U JP 17123886U JP 17123886 U JP17123886 U JP 17123886U JP S6378256 U JPS6378256 U JP S6378256U
- Authority
- JP
- Japan
- Prior art keywords
- photodiode
- photodetector
- center
- entrance window
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
第1図ないし第3図はこの考案の一実施例を示
すもので、第1図は側面図、第2図は概略斜視図
、第3図は4分割フオトダイオードの検出原理を
示す結線図、第4図は従来例を示す側面図、第5
図は回折光量測定原理を示す概略側面図、第6図
は概略斜視図である。
1……レーザ管(レーザ光源)、3……ワーク
(被測定物)、4……回折光(レーザビーム)、
5……光検出器、10……フオトダイオード、1
2……入射窓、15……補助光検出器、17……
4分割フオトダイオード、18……入射窓。
1 to 3 show an embodiment of this invention, in which FIG. 1 is a side view, FIG. 2 is a schematic perspective view, and FIG. 3 is a wiring diagram showing the detection principle of a 4-division photodiode. Figure 4 is a side view showing the conventional example, Figure 5
The figure is a schematic side view showing the principle of measuring the amount of diffraction light, and FIG. 6 is a schematic perspective view. 1... Laser tube (laser light source), 3... Work (object to be measured), 4... Diffracted light (laser beam),
5...Photodetector, 10...Photodiode, 1
2...Incidence window, 15...Auxiliary light detector, 17...
4-division photodiode, 18...incidence window.
Claims (1)
ダイオードに対する入射窓を備えた光検出器との
間に被測定物を配置し、この被測定物にレーザビ
ームを照射してこの被測定物からの回折光量等を
光検出器のフオトダイオードにより測定する光強
度精密測定装置において、4分割フオトダイオー
ド及びこの4分割フオトダイオードに対する入射
窓を備えこれらの4分割フオトダイオード中心と
入射窓中心とを結ぶ直線を前記光検出器のフオト
ダイオード中心と入射窓中心とを結ぶ直線に対し
て一定距離離間した平行状態に設定してなる位置
検出用の補助光検出器を前記光検出器と一体的に
設けたことを特徴とする光強度精密測定装置。 An object to be measured is placed between a laser light source and a photodetector equipped with a photodiode and an entrance window for the photodiode, and the object to be measured is irradiated with a laser beam to measure the amount of diffracted light from the object. A precision light intensity measurement device that measures light intensity using a photodiode of a photodetector, comprising a four-division photodiode and an entrance window for the four-division photodiode, and a straight line connecting the center of the four-division photodiode and the center of the entrance window is used for the light detection. An auxiliary photodetector for position detection is provided integrally with the photodetector, the auxiliary photodetector being set parallel to the straight line connecting the center of the photodiode of the device and the center of the entrance window and spaced a certain distance apart. A precision measuring device for light intensity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17123886U JPS6378256U (en) | 1986-11-07 | 1986-11-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17123886U JPS6378256U (en) | 1986-11-07 | 1986-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6378256U true JPS6378256U (en) | 1988-05-24 |
Family
ID=31106686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17123886U Pending JPS6378256U (en) | 1986-11-07 | 1986-11-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6378256U (en) |
-
1986
- 1986-11-07 JP JP17123886U patent/JPS6378256U/ja active Pending
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