JPS6378066U - - Google Patents

Info

Publication number
JPS6378066U
JPS6378066U JP17182586U JP17182586U JPS6378066U JP S6378066 U JPS6378066 U JP S6378066U JP 17182586 U JP17182586 U JP 17182586U JP 17182586 U JP17182586 U JP 17182586U JP S6378066 U JPS6378066 U JP S6378066U
Authority
JP
Japan
Prior art keywords
ring
film
holding ring
holds
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17182586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538051Y2 (US20100012521A1-20100121-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17182586U priority Critical patent/JPH0538051Y2/ja
Publication of JPS6378066U publication Critical patent/JPS6378066U/ja
Application granted granted Critical
Publication of JPH0538051Y2 publication Critical patent/JPH0538051Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP17182586U 1986-11-08 1986-11-08 Expired - Lifetime JPH0538051Y2 (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17182586U JPH0538051Y2 (US20100012521A1-20100121-C00001.png) 1986-11-08 1986-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17182586U JPH0538051Y2 (US20100012521A1-20100121-C00001.png) 1986-11-08 1986-11-08

Publications (2)

Publication Number Publication Date
JPS6378066U true JPS6378066U (US20100012521A1-20100121-C00001.png) 1988-05-24
JPH0538051Y2 JPH0538051Y2 (US20100012521A1-20100121-C00001.png) 1993-09-27

Family

ID=31107812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17182586U Expired - Lifetime JPH0538051Y2 (US20100012521A1-20100121-C00001.png) 1986-11-08 1986-11-08

Country Status (1)

Country Link
JP (1) JPH0538051Y2 (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005042114A (ja) * 2003-07-24 2005-02-17 General Electric Co <Ge> 薄膜の取り扱いを容易にする方法及び器具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005042114A (ja) * 2003-07-24 2005-02-17 General Electric Co <Ge> 薄膜の取り扱いを容易にする方法及び器具

Also Published As

Publication number Publication date
JPH0538051Y2 (US20100012521A1-20100121-C00001.png) 1993-09-27

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