JPS6377592A - Method and apparatus for treatment by ozone - Google Patents

Method and apparatus for treatment by ozone

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Publication number
JPS6377592A
JPS6377592A JP22179086A JP22179086A JPS6377592A JP S6377592 A JPS6377592 A JP S6377592A JP 22179086 A JP22179086 A JP 22179086A JP 22179086 A JP22179086 A JP 22179086A JP S6377592 A JPS6377592 A JP S6377592A
Authority
JP
Japan
Prior art keywords
ozone
treated
water
ultrasonic
ultrasonic waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22179086A
Other languages
Japanese (ja)
Inventor
Toshiaki Fujii
敏昭 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Research Co Ltd
Original Assignee
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Research Co Ltd filed Critical Ebara Research Co Ltd
Priority to JP22179086A priority Critical patent/JPS6377592A/en
Publication of JPS6377592A publication Critical patent/JPS6377592A/en
Pending legal-status Critical Current

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  • Physical Water Treatments (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)

Abstract

PURPOSE:To accelerate oxidation reaction by projecting ultrasonic waves and/or UV rays to a material to be treated while bringing ozone into dispersive contact or contact with said material, thereby cracking the ozone and generating excitation oxygen atoms. CONSTITUTION:The ultrasonic waves and/or UV rays are projected to the material to be treated while the ozone is brought into dispersive contact or contact therewith. For example, water 1 to be treated is fed through an ozone flow 3 and suction pipe part 4 from an ejector part 2 to a treatment tan 5. The ozone is dispersed into the water to be treated by the air flow dispersing and mixing effect of the ejector 2 and the ultrasonic effect, etc., to be described afterward in said pipe part 4. Furthermore, the dispersion of the ozone is accelerated by the ultrasonic waves from an ultrasonic oscillator 6 in the pipe part 4. The ozone, irradiated with the UV rays from a UV lamp 7, generates the excitation oxygen atoms, etc., to accelerate the reaction with the treated water. As a result, the decoloration, deodorization, sterilization or oxidation, etc., of the water to be treated by the ozone are efficiently executed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、オゾンにより脱色、脱臭、殺菌或いは酸化等
の処理を行なう方法及びその装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for performing treatments such as decolorization, deodorization, sterilization, and oxidation using ozone.

〔従来の技術及びその問題点〕[Conventional technology and its problems]

従来この種の装置例えば、水溶液状試料として下水、し
尿等の排水処理におけるオゾンによる処理方法、及びそ
の装置は、反応槽の1方から処理水を導入し、他方(又
は同方向)よりオゾン発生器からのオゾンを含んだ気流
を圧送することにより、例えばエアレーション方式で処
理水とオゾンを反応させる方式であった。
Conventionally, this type of device, for example, a treatment method using ozone to treat wastewater such as sewage or human waste as an aqueous sample, and the device introduces treated water from one side of the reaction tank and generates ozone from the other side (or the same direction). For example, an aeration method was used to cause the treated water and ozone to react by force-feeding an airflow containing ozone from a container.

この欠点として、■オゾンが処理水と接触不十分なため
、十分に反応しない欠点があり、このため未反応オゾン
が流出するので後方で二次公害防止のために別途装置に
よりオゾンの分解処理を行う必要があり、装置が大型か
つ複雑化し、コスト高であった。又、■オゾンによる反
応のみであるから反応(酸化力)が不十分な場合があり
、十分に反応しないばかりか中間生成物(反応中間物例
、オシニド化合物)が生成し、これが排出されるため二
次公害の恐れがあった。
The disadvantage of this is that: - Because the ozone does not come into sufficient contact with the treated water, it does not react sufficiently.As a result, unreacted ozone flows out, so a separate device is used to decompose the ozone at the rear to prevent secondary pollution. This made the equipment large and complicated, resulting in high costs. In addition, ■Since the reaction only involves ozone, the reaction (oxidizing power) may not be sufficient, and not only will the reaction not be sufficient, but also intermediate products (reaction intermediates, osinide compounds) will be generated, which will be discharged. There was a risk of secondary pollution.

一方、オゾンの利用分野、用途は表−1に示すようにか
なり広範囲にわたり、且つかなり効果的な処理作用があ
るが、現状の装置では処理費用が高く、経済性に問題が
あった。
On the other hand, as shown in Table 1, ozone can be used in a wide range of fields and applications, and has a fairly effective treatment effect, but the current equipment has high treatment costs and is uneconomical.

表  −1 〔発明の構成〕 本発明は、被処理物にオゾンを分散接触させながら又は
接触させながら、超音波及び/又は紫外線を照射するこ
とによりオゾンの分解を促進し、励起酸素原子を発生さ
せ、超音波を照射する場合には、更に分散作用と相まっ
て酸化反応を促進する方法及びその装置である。
Table 1 [Structure of the invention] The present invention promotes the decomposition of ozone by irradiating ultrasonic waves and/or ultraviolet rays while dispersing or contacting ozone with the object to be treated, thereby generating excited oxygen atoms. This method and apparatus further promotes the oxidation reaction in combination with the dispersion effect when ultrasonic waves are irradiated.

以下、図面に基いて本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail based on the drawings.

第1図は、オゾン気流の処理水への分散なエゼクター方
式で行う例を示す装置の断面概略図である。
FIG. 1 is a schematic cross-sectional view of an apparatus showing an example in which an ejector method is used to disperse an ozone stream into treated water.

被処理水1はエゼクター部2からオゾン気流Sを吸込み
管部4を通り、処理槽5へ送られる。
The water to be treated 1 is sent to the treatment tank 5 through the suction pipe section 4 through the suction pipe section 4 with the ozone air flow S from the ejector section 2 .

管部4では、エゼクター部2の気流分散、混合作用及び
後述の超音波作用等によυオゾンが被処理水中に分散さ
れる。
In the pipe section 4, υ ozone is dispersed into the water to be treated by the airflow dispersion of the ejector section 2, the mixing action, the ultrasonic action described below, and the like.

オゾン気流の被処理水への分散、混合方法は、オゾン気
流を細かい気泡状として分散し吹き込む作用がある方式
であればどのような方式でも良い。例えば、旋回流式、
全面エアレーション式、水中攪拌式、微細気泡噴射式(
エゼクター方式)がある。
The method for dispersing and mixing the ozone stream into the water to be treated may be any method as long as it has the effect of dispersing and blowing the ozone stream in the form of fine bubbles. For example, swirl flow type,
Full-surface aeration type, underwater stirring type, fine bubble injection type (
There is an ejector method).

このうち、エゼクター方式が分散及び細分化において効
果的であり好ましい。
Among these, the ejector method is effective in dispersion and subdivision and is preferred.

又管部4には超音波発振器6及び紫外線ランプ7が備え
られている。
The tube section 4 is also equipped with an ultrasonic oscillator 6 and an ultraviolet lamp 7.

ここでは、超音波発振器6により処理水に分散したオゾ
ンが超音波の作用をうけ、更に分散作用が促進される。
Here, the ozone dispersed in the treated water by the ultrasonic oscillator 6 is subjected to the action of ultrasonic waves, further promoting the dispersion effect.

被処理水に分散したオゾンは、紫外線ランプ7からの紫
外線の照射により、及び超音波発振器6からの超音波の
作用により分解され、オゾンよりも桁違いに活性な励起
酸素原子等を生じ、処理水との反応が促進される。
The ozone dispersed in the water to be treated is decomposed by the ultraviolet rays from the ultraviolet lamp 7 and by the action of ultrasonic waves from the ultrasonic oscillator 6, producing excited oxygen atoms, etc., which are orders of magnitude more active than ozone, and the treatment Reaction with water is accelerated.

超音波の周波数は処理水においてオゾンの分散作用、及
び/又はオゾンの分解作用を有する範囲内のものであれ
ば良い。一般に10〜へ000KHzの範囲内のものを
用いることが出来、通常好ましくは30〜500 KH
z程度の周波数の超音波を磁歪振動子、殻形凹面振動子
等の振動子を用いて発生させて用いられる。
The frequency of the ultrasonic waves may be within a range that has an ozone dispersion effect and/or an ozone decomposition effect in the treated water. In general, those within the range of 10 to 000 KHz can be used, and usually preferably 30 to 500 KH
Ultrasonic waves having a frequency of approximately z are generated using a vibrator such as a magnetostrictive vibrator or a shell-shaped concave vibrator.

超音波の周波数又は振動子は、処理方法(反応方法)、
装置の形式、構造、及び希望する経済性等により適宜選
択出来る。
The ultrasonic frequency or oscillator depends on the processing method (reaction method),
It can be selected as appropriate depending on the type and structure of the device, desired economic efficiency, etc.

紫外線ランプは、紫外線照射により、オゾンが分解し、
活性な励起酸素原子等を生成する波長の紫外線を発生す
るものであれば良い。通常、オゾンの吸収波長、例えば
254nmに波長ピークを有するランプが好ましい。
Ultraviolet lamps decompose ozone through ultraviolet irradiation,
Any device that generates ultraviolet rays with a wavelength that generates active excited oxygen atoms etc. may be used. Generally, a lamp having a wavelength peak at the absorption wavelength of ozone, for example 254 nm, is preferred.

低圧水銀ランプ(水銀蒸気圧10″″S〜10 ” T
orr)又は中〜高圧水銀ランプを用い、紫外線ランプ
の照射によりオゾン気流(0,含有)からオゾンの生成
とオゾンの分解を同時に行っても良い。
Low-pressure mercury lamp (mercury vapor pressure 10''S~10''T
Orr) or a medium to high pressure mercury lamp may be used to simultaneously generate ozone and decompose ozone from an ozone air stream (0, containing) by irradiation with an ultraviolet lamp.

この様にして、オゾン気に5は、処理水1に分散され、
オゾンから生成する励起酸素原子や残存オゾンにより処
理水の処理が迅速簡便に行われる。
In this way, ozone gas 5 is dispersed in treated water 1,
Treated water can be treated quickly and easily using excited oxygen atoms generated from ozone and residual ozone.

管部4で処理された被処理水は、更に処理槽5中で、ゆ
っくりと反応が行われ、これによシ十分に処理が行われ
る。
The water to be treated that has been treated in the pipe section 4 is further slowly reacted in the treatment tank 5, whereby the treatment is sufficiently carried out.

処理水は、排出口8より堰り出す。The treated water is discharged from the outlet 8.

第1図に示す例では、オゾン気流の分散、超音波の照射
及び紫外線の照射を全て行った例であり、これら5種類
の作用を併用することが効果的であり、最も好ましい。
The example shown in FIG. 1 is an example in which ozone airflow dispersion, ultrasonic irradiation, and ultraviolet ray irradiation are all performed, and it is effective and most preferable to use these five types of effects in combination.

これら3要素の組合せ方法は、装置の形式、構造、経済
性等で適宜組合せて行うことが出来る。これらは、2種
類以上を併用して行うことで、効果的であり、実用上好
ましい効果を生ずる。
These three elements can be combined as appropriate depending on the type, structure, economic efficiency, etc. of the device. These are effective and produce practically preferable effects when used in combination of two or more.

実用上好ましい2種類の組合せは、オゾン気流の分散と
紫外憩照射である。
Two combinations that are practically preferable are ozone airflow dispersion and ultraviolet diverting irradiation.

第1図に示す例は、超音波発振部、紫外線照射部及びオ
ゾン気流供給部を処理槽5上部に設置した場合の例であ
るがオゾン気流吸込み口を処理槽5下部とし、下部(被
処理水中)に超音波発振部及び紫外線照射部を設置して
も良い事は言う迄もない。
The example shown in Fig. 1 is an example in which the ultrasonic oscillation unit, ultraviolet irradiation unit, and ozone airflow supply unit are installed in the upper part of the processing tank 5. It goes without saying that the ultrasonic oscillator and ultraviolet irradiator may be installed underwater (underwater).

以上図面に基いて液体の処理方法について説明したが、
本発明はガス中に含まれている有害成分或いは悪臭成分
等をオゾンにより分解除去するのに用いることが可能で
ある。
The liquid processing method has been explained above based on the drawings, but
The present invention can be used to decompose and remove harmful components or malodorous components contained in gas using ozone.

また従来製造工程において半導体チップ上に付着した汚
れは薬剤、溶剤等で除去していたが、このような半導体
上に付着した汚れをオゾン含有ガスを通じながら、超音
波及び/又は紫外線を照射することにより乾式で除去す
ることが出来る。従って、半導体を薬剤或いは溶剤等に
より傷めることがない。
In addition, in the conventional manufacturing process, dirt adhering to semiconductor chips was removed using chemicals, solvents, etc., but now it is possible to remove dirt adhering to semiconductors by irradiating them with ultrasonic waves and/or ultraviolet rays while passing ozone-containing gas through them. It can be removed dry. Therefore, semiconductors are not damaged by chemicals, solvents, or the like.

実施例1 第1図に示すオゾン反応装置(容積: 2ooz)にし
尿を101 /miユで供給し、エゼクター方式でオゾ
ン(9度1.2%/空気)気流を吸込み、超音波及び紫
外線の照射を行い、し尿の色度、co′D及びリークオ
ゾン濃度を調べた。又、オゾン反応装置下部に散気筒を
介してオゾン気流を供給し、下部水中で超音波発振、紫
外線照射を行い同様に調べた。
Example 1 The ozone reactor shown in Fig. 1 (volume: 2 oz) was supplied with human urine at 101/mil, and an ozone (9°C 1.2%/air) airflow was sucked in using an ejector system, and ultrasonic and ultraviolet rays were emitted. Irradiation was performed, and the chromaticity, co'D, and leak ozone concentration of human waste were examined. In addition, an ozone air stream was supplied to the lower part of the ozone reactor through a diffuser tube, and the water in the lower part was subjected to ultrasonic oscillation and ultraviolet irradiation, and the same investigation was conducted.

これらの結果を表−1に記載する。These results are listed in Table-1.

オゾン注入率: 25 W’19/1 超音波周波数: 200 KHz 〃 振動子:球殻凹面撮動子 紫外線ランプ:低圧水銀ランプ、20W処理し尿(原水
)の色度:450 #      C!OD:160〜/l〔発明の効果〕 1、 超音波及び/又は紫外線を照射することにより、
Ozone injection rate: 25 W'19/1 Ultrasonic frequency: 200 KHz 〃 Vibrator: Spherical concave camera element Ultraviolet lamp: Low pressure mercury lamp, 20W Chromaticity of treated human waste (raw water): 450 #C! OD: 160~/l [Effects of the invention] 1. By irradiating ultrasonic waves and/or ultraviolet rays,
.

■ オゾンを分解し、オゾンに比べ桁違いに強い活性な
励起酸素原子等を生成し、処理反応が迅速に行える。
■ It decomposes ozone and generates active oxygen atoms, which are orders of magnitude stronger than ozone, allowing for rapid processing reactions.

■ 反応が促進されたから未反応のリークオゾンが無く
なり二次公害防止用のリークオゾン処理装置が不用とな
シ装置がコンパクト化できる。
■ Since the reaction is accelerated, there is no unreacted leak ozone, and a leak ozone treatment device for secondary pollution prevention is unnecessary, and the device can be made more compact.

■ 反応が迅速に起こるから中間反応生成物の生成、残
留がなく、十分な処理が行える。
■ Because the reaction occurs quickly, there is no generation or residue of intermediate reaction products, and sufficient processing can be performed.

λ 超音波照射によりオゾン気流の処理水への分散を行
うことにより、 ■ オゾンが被処理水へ均一に分散、細分化した。
By dispersing the ozone stream into the treated water using λ ultrasonic irradiation, ■ ozone was uniformly dispersed and subdivided into the treated water.

■ オゾンの被処理水への反応表面積が増大した。■ The reaction surface area of ozone to treated water has increased.

五 超音波の照射、或いは紫外線の照射或いはこの両者
とオゾン気流の分散とを組合せて行うことで、 ■ 1.2記載の効果が相刹的に高まり、従来にない高
効率な反応装置が出来た。
(5) By performing ultrasonic irradiation, ultraviolet ray irradiation, or a combination of both and dispersion of ozone airflow, the effects described in 1.2 can be mutually enhanced, making it possible to create an unprecedentedly highly efficient reaction device. Ta.

■ オゾンの作用が増大、促進され、経済性、実用性が
向上した。即ち、オゾン自体の発生効率(例、無声放電
による方法)は、十分とは言えないが、オゾンの利用効
率がかなり上昇したので、実質的にオゾンの発生効率が
上昇した効果と同じ効果となり、経済性、実用性が向上
した。
■ The effect of ozone has been increased and promoted, improving economic efficiency and practicality. In other words, although the efficiency of generating ozone itself (for example, using silent discharge) cannot be said to be sufficient, the utilization efficiency of ozone has increased considerably, so the effect is essentially the same as that of increasing the efficiency of ozone generation. Improved economy and practicality.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明装置の1例を示すための断面概略図を示
す。
FIG. 1 shows a schematic cross-sectional view showing one example of the device of the present invention.

Claims (1)

【特許請求の範囲】 1、被処理物にオゾンを分散接触又は接触せしめながら
超音波及び/又は紫外線を照射することを特徴とするオ
ゾンによる処理方法。 2、オゾン気流の分散をエゼクター方式で行なう特許請
求の範囲第1項記載の方法。 3、周波数が10〜5,000KHzの超音波を照射す
る特許請求の範囲第1項又は第2項記載の方法。 4、オゾンの吸収波長を含む紫外線を照射する特許請求
の範囲第1項又は第2項記載の方法。 5、254nmの波長の紫外線を照射する特許請求の範
囲第4項記載の方法。 6、オゾンによる処理装置において、オゾン気流の分散
部と超音波発振部及び/又は紫外線照射部とを備えてな
るオゾンによる処理装置。
[Scope of Claims] 1. A treatment method using ozone, which comprises irradiating an object with ultrasonic waves and/or ultraviolet rays while dispersing or bringing ozone into contact with the object. 2. The method according to claim 1, wherein the ozone airflow is dispersed by an ejector method. 3. The method according to claim 1 or 2, wherein ultrasonic waves having a frequency of 10 to 5,000 KHz are irradiated. 4. The method according to claim 1 or 2, which irradiates ultraviolet rays that include an absorption wavelength of ozone. 5. The method according to claim 4, wherein ultraviolet rays having a wavelength of 5,254 nm are irradiated. 6. An ozone treatment device comprising an ozone airflow dispersion section, an ultrasonic oscillation section, and/or an ultraviolet irradiation section.
JP22179086A 1986-09-22 1986-09-22 Method and apparatus for treatment by ozone Pending JPS6377592A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22179086A JPS6377592A (en) 1986-09-22 1986-09-22 Method and apparatus for treatment by ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22179086A JPS6377592A (en) 1986-09-22 1986-09-22 Method and apparatus for treatment by ozone

Publications (1)

Publication Number Publication Date
JPS6377592A true JPS6377592A (en) 1988-04-07

Family

ID=16772243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22179086A Pending JPS6377592A (en) 1986-09-22 1986-09-22 Method and apparatus for treatment by ozone

Country Status (1)

Country Link
JP (1) JPS6377592A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264878A (en) * 1989-04-05 1990-10-29 Hitachi Ltd Method for measuring access time
JPH0326395U (en) * 1989-07-19 1991-03-18
JPH0326396U (en) * 1989-07-19 1991-03-18
JPH0515884A (en) * 1991-07-11 1993-01-26 Kubota Corp Ozone catalytic reaction vessel
JP2000516522A (en) * 1996-07-04 2000-12-12 ドゥ モイレナエル エリック コルデマンス Apparatus and method for treating liquid medium
JP2002200486A (en) * 2000-09-27 2002-07-16 Tokyo Flow Meter Kenkyusho:Kk Apparatus for treating microbe-containing subject to be treated
JP2002528570A (en) * 1998-10-24 2002-09-03 チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド Method for the control of microbial contamination in aqueous solid suspensions
CN1308247C (en) * 2004-11-08 2007-04-04 武汉大学 Dye waste water treating method and apparatus
CN102358636A (en) * 2011-09-19 2012-02-22 哈尔滨工业大学 System for treating dye wastewater and method for treating triphenylmethane dye wastewater
NL1039050C2 (en) * 2011-09-19 2013-03-21 Stichting Wetsus Ct Excellence Sustainable Water Technology Device and method for a uv disinfection reactor.
RU224112U1 (en) * 2023-12-18 2024-03-18 Инесса Анатольевна Миненко WATER OZONATOR

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264878A (en) * 1989-04-05 1990-10-29 Hitachi Ltd Method for measuring access time
JPH0326395U (en) * 1989-07-19 1991-03-18
JPH0326396U (en) * 1989-07-19 1991-03-18
JPH0515884A (en) * 1991-07-11 1993-01-26 Kubota Corp Ozone catalytic reaction vessel
JP2010158679A (en) * 1996-07-04 2010-07-22 Ashland Licensing & Intellectual Property Llc Device and process for treating liquid medium
JP2007125554A (en) * 1996-07-04 2007-05-24 Ashland Licensing & Intellectual Property Llc Apparatus and method for treating liquid medium
JP2000516522A (en) * 1996-07-04 2000-12-12 ドゥ モイレナエル エリック コルデマンス Apparatus and method for treating liquid medium
JP2002528570A (en) * 1998-10-24 2002-09-03 チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド Method for the control of microbial contamination in aqueous solid suspensions
JP2002200486A (en) * 2000-09-27 2002-07-16 Tokyo Flow Meter Kenkyusho:Kk Apparatus for treating microbe-containing subject to be treated
CN1308247C (en) * 2004-11-08 2007-04-04 武汉大学 Dye waste water treating method and apparatus
CN102358636A (en) * 2011-09-19 2012-02-22 哈尔滨工业大学 System for treating dye wastewater and method for treating triphenylmethane dye wastewater
NL1039050C2 (en) * 2011-09-19 2013-03-21 Stichting Wetsus Ct Excellence Sustainable Water Technology Device and method for a uv disinfection reactor.
RU224112U1 (en) * 2023-12-18 2024-03-18 Инесса Анатольевна Миненко WATER OZONATOR

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