JPS6377343U - - Google Patents
Info
- Publication number
- JPS6377343U JPS6377343U JP17137586U JP17137586U JPS6377343U JP S6377343 U JPS6377343 U JP S6377343U JP 17137586 U JP17137586 U JP 17137586U JP 17137586 U JP17137586 U JP 17137586U JP S6377343 U JPS6377343 U JP S6377343U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ion implantation
- guide rail
- processing chamber
- vacuum processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17137586U JPS6377343U (enExample) | 1986-11-10 | 1986-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17137586U JPS6377343U (enExample) | 1986-11-10 | 1986-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6377343U true JPS6377343U (enExample) | 1988-05-23 |
Family
ID=31106940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17137586U Pending JPS6377343U (enExample) | 1986-11-10 | 1986-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6377343U (enExample) |
-
1986
- 1986-11-10 JP JP17137586U patent/JPS6377343U/ja active Pending
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