JPS6376814U - - Google Patents
Info
- Publication number
- JPS6376814U JPS6376814U JP17123986U JP17123986U JPS6376814U JP S6376814 U JPS6376814 U JP S6376814U JP 17123986 U JP17123986 U JP 17123986U JP 17123986 U JP17123986 U JP 17123986U JP S6376814 U JPS6376814 U JP S6376814U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- reference plane
- optical unit
- holder
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Description
第１図はこの考案の第一の実施例を示す縦断側
面図、第２図はこの考案の第二の実施例を示す一
部の縦断側面図、第３図はこの考案の第三の実施
例を示す一部の縦断側面図、第４図は光学系の一
例を示す平面図、第５図は従来のミラー取付構造
の一例を示す縦断側面図である。
３……ビームエキスパンダ（光学ユニツト）、
６……基準面、１１……保持体、１４……エアバ
ネ、１７……ミラー。
Fig. 1 is a vertical side view showing a first embodiment of this invention, Fig. 2 is a partial longitudinal side view showing a second embodiment of this invention, and Fig. 3 is a third embodiment of this invention. FIG. 4 is a plan view showing an example of an optical system, and FIG. 5 is a longitudinal side view showing an example of a conventional mirror mounting structure. 3...beam expander (optical unit),
6...Reference surface, 11...Holding body, 14...Air spring, 17...Mirror.
Claims (1)
トと、調整用のミラーと、前記光学ユニツトに着
脱自在の保持体とを具備し、前記ミラーに圧力を
加えることにより前記基準面にそのミラーを圧接
するようにした光学系調整用ミラー取付装置にお
いて、前記ミラーと前記保持体との間に空気の出
し入れ自在のエアバネを設けたことを特徴とする
光学系調整用ミラー取付装置。 It is equipped with an optical unit having a reference plane perpendicular to the machine axis, a mirror for adjustment, and a holder detachable from the optical unit, and the mirror is pressed against the reference plane by applying pressure to the mirror. What is claimed is: 1. A mirror mounting device for adjusting an optical system, characterized in that an air spring is provided between the mirror and the holder to allow air to be taken in and out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17123986U JPS6376814U (en) | 1986-11-07 | 1986-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17123986U JPS6376814U (en) | 1986-11-07 | 1986-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6376814U true JPS6376814U (en) | 1988-05-21 |
Family
ID=31106688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17123986U Pending JPS6376814U (en) | 1986-11-07 | 1986-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6376814U (en) |
-
1986
- 1986-11-07 JP JP17123986U patent/JPS6376814U/ja active Pending