JPS6375810U - - Google Patents
Info
- Publication number
- JPS6375810U JPS6375810U JP17091686U JP17091686U JPS6375810U JP S6375810 U JPS6375810 U JP S6375810U JP 17091686 U JP17091686 U JP 17091686U JP 17091686 U JP17091686 U JP 17091686U JP S6375810 U JPS6375810 U JP S6375810U
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- vibration detector
- detection signal
- memory contents
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 238000002955 isolation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Description
第１図は、本考案の一実施例を説明するための
構成図、第２図は、本考案の実施に使用する補正
量を得るための構成を示す図である。
１１…除振台、１２…被測定物体、１３…三次
元座標測定装置、１４…接触子、１５…検出信号
、１６…演算処理装置、１７…振動検出器、１８
…検出信号、１９…測定信号、２０…振動発生機
、２１…基準板、２２…出力信号。
FIG. 1 is a block diagram for explaining an embodiment of the present invention, and FIG. 2 is a diagram showing a configuration for obtaining a correction amount used in implementing the present invention. DESCRIPTION OF SYMBOLS 11... Vibration isolation table, 12... Measured object, 13... Three-dimensional coordinate measuring device, 14... Contact, 15... Detection signal, 16... Arithmetic processing unit, 17... Vibration detector, 18
...detection signal, 19...measurement signal, 20...vibration generator, 21...reference plate, 22...output signal.
Claims (1)
する形態測定装置において、前記除振台上に載置
された振動検出器と、該振動検出器の検出信号と
前記除振台に載置された形態測定器の検出信号と
を演算処理する演算処理装置とを有し、該演算処
理装置は、前記除振台を予め定められた周波数範
囲にわたつて加振した時の振動特性を記憶したメ
モリを具備しており、該メモリ内容と前記振動検
出器の検出信号とを比較して該振動検出器の検出
周波数に対応した補正値を前記メモリ内容より算
出し、前記測定器の出力信号を該算出結果に基づ
いて補正するようにしたことを特徴とする形態測
定装置。 In a form measuring device that measures the form of an object to be measured placed on a vibration isolating table, a vibration detector placed on the vibration isolating table and a detection signal of the vibration detector and the vibration isolating table are connected to each other. and an arithmetic processing device that arithmetic processes the detection signal of the mounted morphometer, and the arithmetic processing device calculates the vibration characteristics when the vibration isolation table is excited over a predetermined frequency range. A correction value corresponding to the detection frequency of the vibration detector is calculated from the memory contents by comparing the memory contents with the detection signal of the vibration detector, and a correction value corresponding to the detection frequency of the vibration detector is calculated from the memory contents. A morphology measuring device characterized in that an output signal is corrected based on the calculation result.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17091686U JPS6375810U (en) | 1986-11-07 | 1986-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17091686U JPS6375810U (en) | 1986-11-07 | 1986-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375810U true JPS6375810U (en) | 1988-05-20 |
Family
ID=31106070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17091686U Pending JPS6375810U (en) | 1986-11-07 | 1986-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375810U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145932A (en) * | 1988-11-28 | 1990-06-05 | Hitachi Cable Ltd | Measurement with optical fiber type distributive thermometer |
-
1986
- 1986-11-07 JP JP17091686U patent/JPS6375810U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145932A (en) * | 1988-11-28 | 1990-06-05 | Hitachi Cable Ltd | Measurement with optical fiber type distributive thermometer |
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