JPS6375760U - - Google Patents

Info

Publication number
JPS6375760U
JPS6375760U JP16908386U JP16908386U JPS6375760U JP S6375760 U JPS6375760 U JP S6375760U JP 16908386 U JP16908386 U JP 16908386U JP 16908386 U JP16908386 U JP 16908386U JP S6375760 U JPS6375760 U JP S6375760U
Authority
JP
Japan
Prior art keywords
compressor
cryogenic
refrigerant
refrigeration system
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16908386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0643647Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986169083U priority Critical patent/JPH0643647Y2/ja
Publication of JPS6375760U publication Critical patent/JPS6375760U/ja
Application granted granted Critical
Publication of JPH0643647Y2 publication Critical patent/JPH0643647Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986169083U 1986-11-05 1986-11-05 極低温冷凍装置 Expired - Lifetime JPH0643647Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986169083U JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986169083U JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Publications (2)

Publication Number Publication Date
JPS6375760U true JPS6375760U (de) 1988-05-20
JPH0643647Y2 JPH0643647Y2 (ja) 1994-11-14

Family

ID=31102565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986169083U Expired - Lifetime JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Country Status (1)

Country Link
JP (1) JPH0643647Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015227775A (ja) * 2010-05-12 2015-12-17 ブルックス オートメーション インコーポレイテッド 極低温冷却のためのシステム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57108557A (en) * 1980-12-25 1982-07-06 Maekawa Seisakusho Kk Capacity control of compressor for liquifying refrigerating plant

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57108557A (en) * 1980-12-25 1982-07-06 Maekawa Seisakusho Kk Capacity control of compressor for liquifying refrigerating plant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015227775A (ja) * 2010-05-12 2015-12-17 ブルックス オートメーション インコーポレイテッド 極低温冷却のためのシステム
US10156386B2 (en) 2010-05-12 2018-12-18 Brooks Automation, Inc. System and method for cryogenic cooling

Also Published As

Publication number Publication date
JPH0643647Y2 (ja) 1994-11-14

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