JPS6375660A - Ultrasonic probe - Google Patents

Ultrasonic probe

Info

Publication number
JPS6375660A
JPS6375660A JP61219486A JP21948686A JPS6375660A JP S6375660 A JPS6375660 A JP S6375660A JP 61219486 A JP61219486 A JP 61219486A JP 21948686 A JP21948686 A JP 21948686A JP S6375660 A JPS6375660 A JP S6375660A
Authority
JP
Japan
Prior art keywords
medium
sonic
lens
sonic wave
medium container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61219486A
Other languages
Japanese (ja)
Inventor
Nobuyuki Nakajima
中島 暢之
Masao Takai
高井 正生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61219486A priority Critical patent/JPS6375660A/en
Publication of JPS6375660A publication Critical patent/JPS6375660A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To easily adjust the depth of an observation position, by mounting a partition wall membrane propagating a sonic wave to the tip part of a medium container and arranging a liquid medium in a sonic wave propagative manner to the sonic propagating direction of a sonic wave lens part by the medium container and the partition wall membrane. CONSTITUTION:A liquid medium 26 is stored in the space formed by a medium container 24 and a partition wall membrane 22, and a sonic lens 16 is provided so as to be immersed in the medium 26 to allow the medium container 24 to slide with a probe main body 14 to make it possible to adjust the depth of the liquid medium 26. When sonic wave beam 20 is generated in the probe main body 14 by the high frequency electric signal applied to a piezoelectric body 12 from a high frequency transmitter 10, said sonic wave beam 20 propagates toward the sonic lens 16 provided to the tip of the probe main body 14. Since the sonic wave lens 16 is immersed in the medium 26 and the space between the partition wall membrane 22 and a specimen 30 is filled with a converging medium, the sonic wave beam 20 is converged to a focus by there elements. By using two liquid medii 18, 26, the minute displacement of the focus becomes possible.

Description

【発明の詳細な説明】 〔厘業上の利用分野〕 本発明は、超音波探触子に係り、特に超音波顕微鏡に好
適な超音波探触子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultrasound probe, and particularly to an ultrasound probe suitable for an ultrasound microscope.

〔従来の技術〕[Conventional technology]

近年数百メガヘルツから1ギガヘルツにおよぶ超高周波
数の音波の発生が可能になったため、水中における音波
長は数ミクロンとなる。したがって、高分解能の超音波
ビームが得られるようになってきた。該超音波ビームを
所定焦点を有する音波レンズで集束させ、観察しようと
する試料1ζ対して発振し、その反射および透過音波を
検知して該試料の観察を行なうものである。詳述すると
、第4図に示すように、高周波発信器10より電気音響
変換素子12(以下単に圧電体という)に印加された高
周波電気信号は、音波伝播媒質から成る探触子本体14
中に超高周波音波すなわち超音波を発生させる。このよ
うにして発生した音波ビーム20は、前記探触子本体1
4の端面に球面に形成された音波レンズ16に達し、該
音波レンズ16と浸漬されている集束用液体媒質18と
で有効な凹面形を形成し、これによって前記音波ビーム
20は焦点Fに収束される。なお、前記圧電体12とし
ては、酸化亜鉛圧電薄膜が、また、探触子本体14とし
てはサファイアあるいは溶融石英等が用いられ、かつ、
集束用液体媒質18としては水が用いられる。
In recent years, it has become possible to generate ultra-high frequency sound waves ranging from several hundred megahertz to one gigahertz, so the length of the sound waves in water is several microns. Therefore, it has become possible to obtain high-resolution ultrasound beams. The ultrasonic beam is focused by a sonic lens having a predetermined focus, oscillated toward the sample 1ζ to be observed, and the reflected and transmitted sound waves are detected to observe the sample. More specifically, as shown in FIG. 4, a high-frequency electric signal applied from a high-frequency transmitter 10 to an electroacoustic transducer 12 (hereinafter simply referred to as a piezoelectric material) is transmitted to a probe body 14 made of a sound wave propagation medium.
It generates ultrahigh frequency sound waves, or ultrasonic waves. The acoustic beam 20 generated in this way is transmitted to the probe main body 1.
The sound beam 20 reaches a spherically formed acoustic lens 16 on the end face of the beam 20, and the acoustic lens 16 and the focusing liquid medium 18 in which it is immersed form an effective concave shape, whereby the acoustic beam 20 is converged to a focal point F. be done. Note that the piezoelectric body 12 is made of a zinc oxide piezoelectric thin film, and the probe body 14 is made of sapphire, fused silica, or the like, and
Water is used as the focusing liquid medium 18.

このように、前記音波ビーム20を集束して試料30に
発振し、該試料30によって反射散乱、透過された超音
波を検出し、試料30の弾性的性質を反映した情報を得
るものである。なお、試料30の任意の深さにおける前
記情報を得るためには、前記探触子本体14と試料30
との間隔を微少な範囲で変化させるとともに所定深さ1
こ位置付けする必要がある。
In this way, the acoustic beam 20 is focused and oscillated on the sample 30, and the ultrasonic waves reflected, scattered, and transmitted by the sample 30 are detected to obtain information reflecting the elastic properties of the sample 30. Note that in order to obtain the information at an arbitrary depth of the sample 30, the probe body 14 and the sample 30 must be
By changing the distance between the
It is necessary to position this.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前記従来技術においては、探触子本体14と試料30と
の間隔をねじ機構を直接用いて調整していた。
In the prior art, the distance between the probe body 14 and the sample 30 was adjusted directly using a screw mechanism.

したがって、微小な変化については限界があり、試料3
0の深さ方向における微小な調整について十分配慮され
ていなかった。
Therefore, there is a limit to minute changes, and sample 3
Not enough consideration was given to minute adjustments in the 0 depth direction.

本発明の目的とするところは、探触子本体と試料との微
小な間隔調整すなわち観察位置深さの調整が容易に行な
える超音波探触子を提供することにある。
An object of the present invention is to provide an ultrasonic probe in which minute distance adjustment between the probe body and a sample, that is, adjustment of the observation position depth, can be easily performed.

〔問題点を解決するための手段〕 上記目的は、探触子本体の音波レンズ側jζ、該音波レ
ンズ先端よりも突出して摺動可能に設置され、内部に液
体媒質を入れる媒質容器を設け、かつ、該媒質容器あ音
波伝播位置に音波が伝播可能で液体媒質を密封する隔壁
手段を設けることによって達成される。
[Means for Solving the Problems] The above object is to provide a medium container which is slidably installed on the sonic lens side of the probe main body so as to protrude beyond the tip of the sonic lens, and which contains a liquid medium therein. This can also be achieved by providing a partition wall means in which a sound wave can propagate and seals the liquid medium at a sound wave propagation position in the medium container.

〔作用〕[Effect]

前記探触子本体における音波レンズ部の音波伝播方向に
、前記媒質容器および隔壁手段とによって音波伝播速度
の異なる複数の液体媒質を音波伝播可能に配置し、前記
媒質容器を探触子本体に対して移動調整して前記各液体
媒質の深さを変化させ音波収束焦点位置を微小調整でき
るよう1こした。
A plurality of liquid media having different sound propagation velocities are arranged in the sound wave propagation direction of the sound wave lens portion in the probe body by the medium container and the partition means so that the sound waves can propagate, and the medium container is placed relative to the probe body. This was done so that the depth of each of the liquid media could be changed by adjusting the movement, thereby finely adjusting the focal position of the sound wave convergence.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図ないし第3図1ζよっ
て説明する。同口において、前記従来例と同一符号は同
一部材を示すものである。24は探触子本体14の音波
レンズ1G側に摺動可能に設置され、その先端部は該音
波レンズ16よりも突出した媒質容器で、探触子本体2
4に対して例えばねじ機構等によって先端突出量を微調
整可能に設けられている。また、該媒質容器24の先端
部には、音波を伝播可能な隔壁膜22が取付けられてい
る。したがって、前記媒質容器24と隔壁膜22とによ
って、その内部に液体媒質26を音波レンズ16を浸漬
させて溜めることができ、かつ、媒質容器26を探触子
本体14に対して摺動させることにより該液体媒質26
の深さを調整できるものである。
Hereinafter, one embodiment of the present invention will be described with reference to FIGS. 1 to 3 1ζ. In the same part, the same reference numerals as in the conventional example indicate the same members. Reference numeral 24 is slidably installed on the sonic lens 1G side of the probe body 14, and its tip is a medium container that protrudes beyond the sonic lens 16.
4, the tip protrusion amount can be finely adjusted by, for example, a screw mechanism. Further, a partition membrane 22 capable of propagating sound waves is attached to the tip of the medium container 24. Therefore, the medium container 24 and the partition membrane 22 allow the liquid medium 26 to be stored therein by immersing the sonic lens 16 therein, and the medium container 26 can be slid relative to the probe body 14. The liquid medium 26
The depth can be adjusted.

このような構成において、高周波発信器10から圧電体
12に印加された高周波ii!気4g号によって、探触
f本体14内に音波ビーム20が生じる。そして、該音
波ビーム20は探触子本体14の先端Jこ設けられた音
波レンズ16に向って伝播する。該音波レンズ16は集
束用媒質26に浸漬され、かつ、隔壁膜22を介して試
料30との間IC渠束用媒質18が満されているため、
これらによって前記音波ビーム20を焦点Fに焦束さす
るものである。なお、前記集束用媒質181ζはM記従
来例と同4.Jに水が用いられ、かつ。
In such a configuration, the high frequency ii! applied from the high frequency oscillator 10 to the piezoelectric body 12! A sound beam 20 is generated within the probe body 14 by the air 4g. The sound wave beam 20 then propagates toward a sound wave lens 16 provided at the tip of the probe body 14. The sonic lens 16 is immersed in the focusing medium 26, and the space between it and the sample 30 is filled with the IC conduit focusing medium 18 through the partition membrane 22.
These focus the acoustic beam 20 to a focal point F. The focusing medium 181ζ is the same as the conventional example M. Water is used in J, and.

果東用謀526には111記水とは音速の異なる液体、
例えばエチルアルコールが用いられる。ちなみに、水の
一4速は約1500m7/sυあり、エチルアルコール
は約1200m/sである。前述のように隔壁膜221
こよって音速の異なる2つの液体媒質を設けるものであ
る。この音速の異なる2つの液体媒質を用いること1こ
より、焦点Fの深さ方向における微小変位を可能にする
ものである。すなわち、集束用媒質18は前述のとおり
音速が約1500m/s 、集束用媒質26は音速が約
1200m/sであるため、両者の屈折比の差は1−1
200/1500=0.2 となり、約5倍の微小変位
調整が可能となる。このことにより、第2図に示すよう
に集束用媒質26および工8によって音波ビーム20を
焦束した焦点Fを試料30の表面に一致させ、次に、第
3図に示すように媒質容器24を前記第2図の状態に比
べて寸法Hだけ変位させると、前記各集束用媒質18お
よび26の音速差によって焦点位置が△hだけ変化する
。なお、前記Hと△hとは次式のような関係にある。
In Kato Yomatsu 526, there is a liquid with a different speed of sound from water in 111,
For example, ethyl alcohol is used. By the way, the 14th speed of water is about 1500 m7/sυ, and the speed of ethyl alcohol is about 1200 m/s. As mentioned above, the partition membrane 221
Therefore, two liquid media having different sound velocities are provided. By using these two liquid media having different sound velocities, it is possible to make a minute displacement of the focal point F in the depth direction. That is, as mentioned above, the sound speed of the focusing medium 18 is about 1500 m/s, and the sound speed of the focusing medium 26 is about 1200 m/s, so the difference in refraction ratio between the two is 1-1.
200/1500=0.2, and a fine displacement adjustment of about 5 times is possible. As a result, as shown in FIG. 2, the focal point F of the acoustic beam 20 focused by the focusing medium 26 and the device 8 is made to coincide with the surface of the sample 30, and then, as shown in FIG. When is displaced by a dimension H compared to the state shown in FIG. 2, the focal position changes by Δh due to the sound speed difference between the focusing media 18 and 26. Note that the above H and Δh have a relationship as shown in the following equation.

すなわち、 Δh→0,2H したがって、焦点Fを寸法Hの約115の微小な変位量
で調整できるため、該焦点Fの深さ方向における微調整
が容易に行なえる。また、前記構成は、隔壁膜22を設
けた媒質容器24を探触子本体24に1動可能に嵌合し
、かつ、該摺動方向にその移動量を調整可能に取付けた
構成で、従来の構成に比べて非常に簡単な構成であり微
調整が可能である。
That is, Δh→0,2H Therefore, since the focal point F can be adjusted by a minute displacement of about 115 times the dimension H, the focal point F can be easily finely adjusted in the depth direction. Further, in the above structure, the medium container 24 provided with the partition membrane 22 is fitted into the probe main body 24 so as to be movable in one direction, and is attached so that the amount of movement thereof can be adjusted in the sliding direction. This is a much simpler configuration than the previous configuration, and can be finely adjusted.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、観察位置深さの微
調整が容易lζ行なえる。
As explained above, according to the present invention, the observation position depth can be easily finely adjusted.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による超音波探触子の一実施例を示す側
面断固、第2図および第3図は第1図の超音波探触子の
焦点調整状態を示す側面断固、第4図は従来の超音波探
触子を示す側面図である。 14・・・・・・探触子本体、16・・・・・・音波レ
ンズ、18 、26・・・・・・液体媒質、20・・・
・・・音波ビーム、22・・・・・・隔壁膜、出面のJ
O ΔI 囚 第2囚 (αン                      
        (bン手続補正書(方式) 車外の表示 昭和61 年特許願第219486  号発明の名称 超音波探触子 補正をする者 匣と(、vlv淋 特許出願人 名  称   Cs+o)株式会計  []  立  
製  f乍  所代   理   人 補正の対象 明細書の発明の詳細な説明の欄および同因面の簡単な補
正 。内容         説明の欄および図面1、
明細書第2頁第8行の「第4図」を「第3図」と補正す
る。 2、明細書第4頁第14行の「第1図ないし第3図」を
「第1図および第2図」と補正する。 3、明細書第4頁第19行の「探触子本体必」を「探触
子本体14」と補正する。 4、明細書第5頁第5行の「媒質容器あ」を「媒質容器
冴」と補正する。 5、明細書第6頁第10行および同第13行の「第2図
」を「第2図(a)」と補正する。 6、明細書第6頁第12行の「第3図」を「第2図(b
)」と補正する。 7、明細書第7頁第11行から同第14行までを下記の
とおりに補正する。 記 音波探触子の焦点調整状態を示す側面断面図、第3図は
従来の超音波探触子を示す側面図である。 8、図面を添付別紙のとおりに補正する。
FIG. 1 is a side view showing an embodiment of the ultrasonic probe according to the present invention, FIGS. 2 and 3 are side views showing the focus adjustment state of the ultrasound probe of FIG. 1, and FIG. FIG. 2 is a side view showing a conventional ultrasound probe. 14... Probe body, 16... Sonic lens, 18, 26... Liquid medium, 20...
... Sound wave beam, 22 ... Septum membrane, J of exit surface
O ΔI Prisoner 2 (αn
(B-procedural amendment (method) Display outside the vehicle Patent Application No. 219486 of 1988 Name of the invention
Manufacturer's agent A simple amendment to the column for the detailed description of the invention and the same cause in the specification subject to person's amendment. Contents Explanation column and drawing 1,
"Fig. 4" on page 2, line 8 of the specification is corrected to "Fig. 3." 2. "Figures 1 to 3" on page 4, line 14 of the specification are corrected to "Figures 1 and 2." 3. Correct "probe body required" on page 4, line 19 of the specification to "probe body 14". 4. Correct "medium container a" on page 5, line 5 of the specification to "medium container sae." 5. "Figure 2" on page 6, line 10 and line 13 of the specification is corrected to "Figure 2 (a)". 6. Change “Figure 3” on page 6, line 12 of the specification to “Figure 2 (b)”
)” is corrected. 7. Page 7, line 11 to line 14 of the specification shall be amended as follows. FIG. 3 is a side sectional view showing a focus adjustment state of the ultrasound probe, and FIG. 3 is a side view showing a conventional ultrasound probe. 8. Amend the drawings as per the attached appendix.

Claims (1)

【特許請求の範囲】[Claims] 1、音波伝播媒質から成る探触子本体の一端に所定の焦
点を有すした音波レンズを形成し、他端に前記音波レン
ズに向って音波ビームを発生させる圧電体を設けた超音
波探触子において、前記探触子本体の音波レンズ側に該
音波レンズ部よりも突出し摺動可能に設置され、内部に
液本媒質を入れる媒質容器を取付け、かつ、該媒質容器
の音波伝播位置に音波が伝播可能で液体媒質を密封する
隔壁手段を設けたことを特徴とする超音波探触子。
1. An ultrasonic probe in which a sonic lens with a predetermined focus is formed at one end of the probe body made of a sound wave propagation medium, and a piezoelectric body is provided at the other end to generate a sound beam toward the sonic lens. A medium container is installed on the sound wave lens side of the probe main body so as to protrude beyond the sound wave lens portion, and a medium container containing a liquid medium is installed therein, and a medium container is installed at the sound wave propagation position of the medium container. 1. An ultrasonic probe characterized by being provided with a partition wall means that allows propagation of water and seals a liquid medium.
JP61219486A 1986-09-19 1986-09-19 Ultrasonic probe Pending JPS6375660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61219486A JPS6375660A (en) 1986-09-19 1986-09-19 Ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61219486A JPS6375660A (en) 1986-09-19 1986-09-19 Ultrasonic probe

Publications (1)

Publication Number Publication Date
JPS6375660A true JPS6375660A (en) 1988-04-06

Family

ID=16736197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61219486A Pending JPS6375660A (en) 1986-09-19 1986-09-19 Ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS6375660A (en)

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