JPS6375041U - - Google Patents
Info
- Publication number
- JPS6375041U JPS6375041U JP16973086U JP16973086U JPS6375041U JP S6375041 U JPS6375041 U JP S6375041U JP 16973086 U JP16973086 U JP 16973086U JP 16973086 U JP16973086 U JP 16973086U JP S6375041 U JPS6375041 U JP S6375041U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- probe card
- wafer stage
- probe
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973086U JPS6375041U (cs) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973086U JPS6375041U (cs) | 1986-11-04 | 1986-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375041U true JPS6375041U (cs) | 1988-05-19 |
Family
ID=31103806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16973086U Pending JPS6375041U (cs) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375041U (cs) |
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1986
- 1986-11-04 JP JP16973086U patent/JPS6375041U/ja active Pending