JPS6375035U - - Google Patents
Info
- Publication number
- JPS6375035U JPS6375035U JP16969886U JP16969886U JPS6375035U JP S6375035 U JPS6375035 U JP S6375035U JP 16969886 U JP16969886 U JP 16969886U JP 16969886 U JP16969886 U JP 16969886U JP S6375035 U JPS6375035 U JP S6375035U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- pure water
- drying tank
- carrier
- centrifugal dryer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16969886U JPS6375035U (da) | 1986-11-05 | 1986-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16969886U JPS6375035U (da) | 1986-11-05 | 1986-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375035U true JPS6375035U (da) | 1988-05-19 |
Family
ID=31103744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16969886U Pending JPS6375035U (da) | 1986-11-05 | 1986-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375035U (da) |
-
1986
- 1986-11-05 JP JP16969886U patent/JPS6375035U/ja active Pending