JPS6374955U - - Google Patents

Info

Publication number
JPS6374955U
JPS6374955U JP16630086U JP16630086U JPS6374955U JP S6374955 U JPS6374955 U JP S6374955U JP 16630086 U JP16630086 U JP 16630086U JP 16630086 U JP16630086 U JP 16630086U JP S6374955 U JPS6374955 U JP S6374955U
Authority
JP
Japan
Prior art keywords
chamber
detection
pressure
solenoid valve
upstream side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16630086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311550Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16630086U priority Critical patent/JPH0311550Y2/ja
Publication of JPS6374955U publication Critical patent/JPS6374955U/ja
Application granted granted Critical
Publication of JPH0311550Y2 publication Critical patent/JPH0311550Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Pipeline Systems (AREA)
JP16630086U 1986-10-29 1986-10-29 Expired JPH0311550Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16630086U JPH0311550Y2 (no) 1986-10-29 1986-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16630086U JPH0311550Y2 (no) 1986-10-29 1986-10-29

Publications (2)

Publication Number Publication Date
JPS6374955U true JPS6374955U (no) 1988-05-18
JPH0311550Y2 JPH0311550Y2 (no) 1991-03-20

Family

ID=31097143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16630086U Expired JPH0311550Y2 (no) 1986-10-29 1986-10-29

Country Status (1)

Country Link
JP (1) JPH0311550Y2 (no)

Also Published As

Publication number Publication date
JPH0311550Y2 (no) 1991-03-20

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