JPS6374955U - - Google Patents

Info

Publication number
JPS6374955U
JPS6374955U JP16630086U JP16630086U JPS6374955U JP S6374955 U JPS6374955 U JP S6374955U JP 16630086 U JP16630086 U JP 16630086U JP 16630086 U JP16630086 U JP 16630086U JP S6374955 U JPS6374955 U JP S6374955U
Authority
JP
Japan
Prior art keywords
chamber
detection
pressure
solenoid valve
upstream side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16630086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311550Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16630086U priority Critical patent/JPH0311550Y2/ja
Publication of JPS6374955U publication Critical patent/JPS6374955U/ja
Application granted granted Critical
Publication of JPH0311550Y2 publication Critical patent/JPH0311550Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Pipeline Systems (AREA)
JP16630086U 1986-10-29 1986-10-29 Expired JPH0311550Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16630086U JPH0311550Y2 (enrdf_load_stackoverflow) 1986-10-29 1986-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16630086U JPH0311550Y2 (enrdf_load_stackoverflow) 1986-10-29 1986-10-29

Publications (2)

Publication Number Publication Date
JPS6374955U true JPS6374955U (enrdf_load_stackoverflow) 1988-05-18
JPH0311550Y2 JPH0311550Y2 (enrdf_load_stackoverflow) 1991-03-20

Family

ID=31097143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16630086U Expired JPH0311550Y2 (enrdf_load_stackoverflow) 1986-10-29 1986-10-29

Country Status (1)

Country Link
JP (1) JPH0311550Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0311550Y2 (enrdf_load_stackoverflow) 1991-03-20

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