JPS6373933U - - Google Patents

Info

Publication number
JPS6373933U
JPS6373933U JP16803686U JP16803686U JPS6373933U JP S6373933 U JPS6373933 U JP S6373933U JP 16803686 U JP16803686 U JP 16803686U JP 16803686 U JP16803686 U JP 16803686U JP S6373933 U JPS6373933 U JP S6373933U
Authority
JP
Japan
Prior art keywords
casing
wafer prober
prober device
members constituting
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16803686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16803686U priority Critical patent/JPS6373933U/ja
Publication of JPS6373933U publication Critical patent/JPS6373933U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16803686U 1986-10-31 1986-10-31 Pending JPS6373933U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16803686U JPS6373933U (zh) 1986-10-31 1986-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16803686U JPS6373933U (zh) 1986-10-31 1986-10-31

Publications (1)

Publication Number Publication Date
JPS6373933U true JPS6373933U (zh) 1988-05-17

Family

ID=31100537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16803686U Pending JPS6373933U (zh) 1986-10-31 1986-10-31

Country Status (1)

Country Link
JP (1) JPS6373933U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435927A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Device for inspecting semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435927A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Device for inspecting semiconductor device

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