JPS6373843U - - Google Patents
Info
- Publication number
- JPS6373843U JPS6373843U JP16811086U JP16811086U JPS6373843U JP S6373843 U JPS6373843 U JP S6373843U JP 16811086 U JP16811086 U JP 16811086U JP 16811086 U JP16811086 U JP 16811086U JP S6373843 U JPS6373843 U JP S6373843U
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- ion source
- frequency power
- frequency
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811086U JPS6373843U (enExample) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811086U JPS6373843U (enExample) | 1986-11-04 | 1986-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373843U true JPS6373843U (enExample) | 1988-05-17 |
Family
ID=31100682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16811086U Pending JPS6373843U (enExample) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373843U (enExample) |
-
1986
- 1986-11-04 JP JP16811086U patent/JPS6373843U/ja active Pending