JPS6373843U - - Google Patents

Info

Publication number
JPS6373843U
JPS6373843U JP16811086U JP16811086U JPS6373843U JP S6373843 U JPS6373843 U JP S6373843U JP 16811086 U JP16811086 U JP 16811086U JP 16811086 U JP16811086 U JP 16811086U JP S6373843 U JPS6373843 U JP S6373843U
Authority
JP
Japan
Prior art keywords
inductively coupled
ion source
frequency power
frequency
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16811086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16811086U priority Critical patent/JPS6373843U/ja
Publication of JPS6373843U publication Critical patent/JPS6373843U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP16811086U 1986-11-04 1986-11-04 Pending JPS6373843U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16811086U JPS6373843U (enrdf_load_stackoverflow) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16811086U JPS6373843U (enrdf_load_stackoverflow) 1986-11-04 1986-11-04

Publications (1)

Publication Number Publication Date
JPS6373843U true JPS6373843U (enrdf_load_stackoverflow) 1988-05-17

Family

ID=31100682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16811086U Pending JPS6373843U (enrdf_load_stackoverflow) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPS6373843U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS639761U (enrdf_load_stackoverflow)
JPS6373843U (enrdf_load_stackoverflow)
JPH0392771U (enrdf_load_stackoverflow)
JPH0316646U (enrdf_load_stackoverflow)
JPS61107192U (enrdf_load_stackoverflow)
JPH0379152U (enrdf_load_stackoverflow)
JPS6286679U (enrdf_load_stackoverflow)
JPS61153991U (enrdf_load_stackoverflow)
JPS61119012U (enrdf_load_stackoverflow)
JPS6259996U (enrdf_load_stackoverflow)
JPS61153448U (enrdf_load_stackoverflow)
JPS6371014U (enrdf_load_stackoverflow)
JPH01101191U (enrdf_load_stackoverflow)
JPH02146798U (enrdf_load_stackoverflow)
JPS61166499U (enrdf_load_stackoverflow)
JPS61107190U (enrdf_load_stackoverflow)
JPS6210390U (enrdf_load_stackoverflow)
JPS6355361U (enrdf_load_stackoverflow)
JPS61201294U (enrdf_load_stackoverflow)
JPS61138229U (enrdf_load_stackoverflow)
JPS6154699U (enrdf_load_stackoverflow)
JPS6377296U (enrdf_load_stackoverflow)
JPS6319745U (enrdf_load_stackoverflow)
JPH03103240U (enrdf_load_stackoverflow)
JPH01154617U (enrdf_load_stackoverflow)