JPS6373358U - - Google Patents
Info
- Publication number
- JPS6373358U JPS6373358U JP16811486U JP16811486U JPS6373358U JP S6373358 U JPS6373358 U JP S6373358U JP 16811486 U JP16811486 U JP 16811486U JP 16811486 U JP16811486 U JP 16811486U JP S6373358 U JPS6373358 U JP S6373358U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- target
- vacuum container
- ion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001659 ion-beam spectroscopy Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811486U JPS6373358U (en, 2012) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811486U JPS6373358U (en, 2012) | 1986-11-04 | 1986-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373358U true JPS6373358U (en, 2012) | 1988-05-16 |
Family
ID=31100690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16811486U Pending JPS6373358U (en, 2012) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373358U (en, 2012) |
-
1986
- 1986-11-04 JP JP16811486U patent/JPS6373358U/ja active Pending