JPS6373351U - - Google Patents
Info
- Publication number
- JPS6373351U JPS6373351U JP16489886U JP16489886U JPS6373351U JP S6373351 U JPS6373351 U JP S6373351U JP 16489886 U JP16489886 U JP 16489886U JP 16489886 U JP16489886 U JP 16489886U JP S6373351 U JPS6373351 U JP S6373351U
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrode
- auxiliary electrode
- main electrode
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001939 inductive effect Effects 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
図面は本考案の一実施例を示すもので、第１図
は第１実施例の説明縦断面図、第２図は第２実施
例の説明縦断面図、第３図は第３実施例の説明平
断面図である。 １…真空容器、２…主電極、３…補助電極、６
…磁気装置。
は第１実施例の説明縦断面図、第２図は第２実施
例の説明縦断面図、第３図は第３実施例の説明平
断面図である。 １…真空容器、２…主電極、３…補助電極、６
…磁気装置。
Claims (1)
- 真空容器内に放電を発生させる主電極及び該主
電極の放電を誘起する補助電極を設けたものにお
いて、上記補助電極に磁気装置を配設して構成し
たことを特徴とする放電装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16489886U JPS6373351U (ja) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16489886U JPS6373351U (ja) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373351U true JPS6373351U (ja) | 1988-05-16 |
Family
ID=31094441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16489886U Pending JPS6373351U (ja) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373351U (ja) |
-
1986
- 1986-10-27 JP JP16489886U patent/JPS6373351U/ja active Pending