JPS6372005A - Light irradiator - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Object of the Invention] (Industrial Field of Application) The present invention is directed to a reflector containing a high-pressure discharge lamp and a light-transmitting member provided to close an irradiation aperture of the reflector. The present invention relates to a light irradiation device that forcibly vents gas into the irradiation device main body.

(Prior Art) As this type of light irradiation device, the one shown in FIG. 8 has been proposed (Japanese Patent Application Laid-open No. 39305/1983).

This is an ultraviolet irradiation device, and includes an irradiation device main body 81 in which a high-pressure discharge lamp 80 such as a high-pressure mercury lamp or a metal halide lamp is disposed. It is composed of six translucent materials 83. The lamp SO emits visible light and infrared heat rays as well as ultraviolet rays, and in the present invention, visible light is also included in heat rays. ). The heat rays not only excessively heat and change the quality of the irradiated object, but also have an adverse effect on the irradiation device main body 81 surrounding the lamp 80 by causing deformation and the like. In order to eliminate such adverse effects, the conventional device shown in FIG. The light member 83 is formed of quartz glass coated with an optical interference film that reflects visible light and transmits ultraviolet rays, and this light transmitting member 83 is used as the irradiation opening 84 of the reflector 82.
The irradiation device main body 81 is configured by arranging the irradiation device so as to close the irradiation device. This irradiation device main body 81 is a box 85 with an open bottom.
The box body 85 has air intake holes 86. An exhaust hole 87 is provided at the top. Furthermore, an exhaust fan is provided above the exhaust hole 87 (not shown).

). The top of the reflector 82 has a gas outlet 88 corresponding to the exhaust hole 87 , and between the reflector 82 and the transparent member 83 a gas inlet is provided corresponding to the intake hole 86 . It forms eight. With this configuration, the heat rays incident on the reflector 82 are transmitted behind the reflector 82, and the transparent member 83 blocks visible light rays. As a result, there is a problem in that the light-transmitting member 83 may not be sufficiently cooled. Such problems are not limited to ultraviolet irradiation devices, but also occur in other light irradiation devices that use high-pressure discharge lamps and perform forced ventilation as described above.

The present invention has been made to solve the two problems mentioned above, and while increasing the cooling effect of the parts that need to be cooled in the irradiation device main body, it suppresses overcooling of the lower part of the high-pressure discharge lamp, thereby reducing the light output. It is an object of the present invention to provide a light irradiation device that can prevent such problems and effectively irradiate desired light onto an irradiated part.

[Structure of the Invention] (Means for Solving the Problems) The present invention provides a reflector that has an irradiation opening on the front surface, includes a high-pressure discharge lamp, reflects at least desired light from the lamp, and a reflector for reflecting at least desired light from the lamp; Between an irradiation device main body having a light-transmitting member that is provided to close the opening and transmits at least desired light among the incident light, and a gas inlet and a gas outlet provided in the irradiation device main body. A light irradiation device comprising a forced ventilation means for cooling the inside of the irradiation device body by passing gas through the irradiation device body, the light irradiation device being arranged along the lamp and at a distance so that the gas does not directly hit the tube wall at the bottom of the lamp. It is characterized by having a light-transmitting wind control body disposed therein. In the present invention, "to enclose the lamp" refers to either enclosing the main light-emitting part of the lamp or enclosing the entire lamp. Also, in the present invention, the tube wall at the lower part of the high-pressure discharge lamp refers to the tube wall in the lower half of the vertical section of the high-pressure discharge lamp. For ultraviolet irradiation equipment, a material that transmits at least ultraviolet rays is used, and for visible light irradiation equipment, a material that transmits at least visible rays is used.
The wind control body is not limited in shape or number as long as it is disposed at least at the portion of the tube wall at the bottom of the high-pressure discharge lamp that is most strongly exposed to gas. For example, if there are two parts of the tube wall at the bottom of the high-pressure discharge lamp that are most strongly hit by the gas, the wind blocking body may be divided and arranged so that the gas does not hit those parts directly. Furthermore, the position of the wind blocking body is determined by where the gas from the gas inflow I hits the tube wall at the bottom of the high-pressure discharge lamp most strongly, and the position of the wind blocking body is determined by the position of the reflector and transparent member. It's not a thing.

(Function) The present invention prevents the gas flowing into the irradiation device main body through the gas inlet by the forced ventilation means and flowing out from the gas outlet from hitting the tube wall at the lower part of the high-pressure discharge lamp by the wind suppressor. Even if the amount of ventilation is increased to some extent, overcooling of the lower part of the high-pressure discharge lamp can be suppressed. Therefore, the members within the irradiation device main body that require cooling can be cooled well, and a decrease in the light output of this high-pressure discharge lamp can be prevented.

Furthermore, when the present invention is used in an ultraviolet irradiation device, a wind blocking body that transmits at least ultraviolet rays is used, and when the present invention is used in a visible light irradiation device, a wind blocking body that transmits at least visible light is used. It does not reduce the amount of light emitted from the irradiation aperture at all or hardly at all. Note that ultra-high pressure discharge lamps are also similar to the above-mentioned high-pressure discharge lamps in terms of reduction in light output due to heat radiation and supercooling, and in this sense, the term "high-pressure discharge lamp" as used in the present invention includes ultra-high pressure discharge lamps.

(Example) Embodiments of the present invention will be described below with reference to the drawings.

1 to 5 are examples in which the present invention is applied to an ultraviolet irradiation device, and FIGS. 6 and 7 are examples in which the present invention is applied to a visible light irradiation device.

FIG. 1 and FIG. 2 show a first embodiment. Reference numeral 1 denotes a high-pressure discharge lamp, for example, a straight-tube high-pressure mercury lamp, a metal halide lamp, etc. When the lamp 1 is turned on, visible light and infrared heat rays are emitted as well as ultraviolet rays.

Reference numeral 2 denotes an irradiation device main body, which includes a reflector 3 and a light-transmitting member 4. The reflector 3 has an irradiation opening 5 on the front side and contains the lamp 1 therein. In this embodiment, the reflector 3 is formed by arranging a pair of reflecting members 6 and 7, each having an arcuate longitudinal section, facing each other with a gap therebetween. Further, each of the reflecting members 6 and 7 of the reflector 3 is
For example, the base material is borosilicate glass, and a multilayer optical interference film that transmits heat rays and reflects ultraviolet rays is coated on the inner surface facing the lamp 1. However, each of the reflecting members 6 and 7 of the reflector 3 may be made of metal such as aluminum, and the shape of the longitudinal section of the reflector 3 may also be determined depending on the required irradiation light distribution. It can be an ellipse, a parabola, a circle, or a partially modified version of these shapes. The light-transmitting member 4 is provided so as to close the irradiation opening 5 of the reflector 3, and is supported by a support 8 in this embodiment. Further, the light-transmitting member 4 is formed using, for example, quartz glass as a base material, and has a multilayer optical interference film that transmits infrared and ultraviolet rays and reflects visible rays coated on the inner surface facing the lamp 1. ing.

Although infrared rays should not originally be transmitted, it is not possible for an optical interference film to sufficiently transmit light in a specific wavelength range while reflecting all unnecessary light in other wavelength ranges. Therefore, visible light, which has a narrower wavelength range than the infrared rays and has a large amount of energy within this wavelength range, is more effective than infrared rays, which have a large total amount of energy but have a wide wavelength range and a small amount of energy within a limited wavelength range. Reflection is effective. However, the light-transmitting member 4 only needs to transmit ultraviolet rays, and may be made of, for example, quartz glass, heat-absorbing glass, borosilicate glass, etc. that are not coated with an optical interference film.

Reference numeral 9 denotes a gas outlet, which is provided in the reflector 3 so as to be located on the side or behind the lamp 1. In this embodiment, the gap between the reflectors 6 and 7 is used as a gas outlet 9. The reflector 3 is placed in a box 10 whose bottom surface is open, and the top surface of the box 10 is open and communicates with the gas outlet 9. Also, this box body 10
The support body 8 is attached to the side of the opening. However, such a box 10 is not necessarily necessary, and the reflector 3 and the transparent member 4 may be supported by other means.

Reference numeral 11 denotes a gas inlet, which is arranged near the side of the irradiation opening 5. A plurality of first holes 12 are provided in the support body 8 located behind the gas inlet 11 . The number and size of the first holes 12 may be changed as required.

Reference numeral 13 denotes a forced ventilation device, which is mainly used to cool the reflector 3 and the transparent member 4, which are thermally weak. In this embodiment, it consists of an exhaust fan 14 and ducts I to 15. This forced ventilation device 13 is provided to exhaust gas from the gas outlet 9. The duct 15 is hermetically fixed to the box 10 by, for example, arc welding, and the exhaust fan 14 exhausts air through the duct 15.

However, the forced ventilation device 13 may be configured using a blower. In this case, it is provided outside the gas inlet 11. Alternatively, the forced ventilation device 13 may be constructed using an exhaust fan and a blower, and these may be provided outside the gas outlet 9 and the gas inlet 11, respectively. In this embodiment, on the side surface of the box body 10,
A second hole 16 is provided on the back surface of the reflector 3 to allow gas to flow through it, and a second hole 16 is provided on the back surface of the box body 10 to allow the gas to flow through the second hole 16. 3 hole 1
7 is provided. These third and second holes 17.
The number and size of the holes 16 may be changed as necessary, and the holes may be closed.

Reference numeral 18 denotes a wind control body, which is provided along the tube axis of the lamp 1 at a distance along the high-pressure discharge lamp. The wind blocking body 18 has a longitudinal cross-section having an arc shape centered on the center of the high-pressure discharge lamp, and an end of the longitudinal cross-section connecting the center of the lamp and the end of the gas inlet 11 on the lamp 1 side. It is located above the connecting line. Moreover, this wind control body 18 is formed, for example, from a quartz glass plate into a circular arc shape.

Further, the wind baffle body 18 is held at both ends in the longitudinal direction by supports 19 and supported by an end plate 20 . Furthermore, the wind control body 18 may be made of quartz glass, soda glass, borosilicate glass, or quartz glass treated to absorb or reflect heat rays and transmit ultraviolet rays, as long as it has ultraviolet light transmittance. However, the material is often not limited. Further, the shape of the vertical cross section may be any shape as long as it prevents the gas from the gas inlet from directly hitting the tube wall at the bottom of the lamp 1. For example, a quartz plate with a figure-7 vertical cross section may be used. .

Next, the operation of this embodiment will be explained.

In the irradiation device main body 2, ultraviolet rays and heat rays are emitted by the discharge of the high-pressure discharge lamp 1, and some of the ultraviolet rays are
The light is reflected by the reflector 3 and reaches the irradiation aperture 5 directly, and the light enters the wind suppressor 18 and is transmitted, and then reaches the irradiation aperture 5. Further, a part of the light directly enters the wind control body 18 and is transmitted, reaching the irradiation aperture 5. These ultraviolet rays pass through the light-transmitting member 4 through the irradiation opening 5 and are irradiated toward the object 21 to be irradiated located below the light-transmitting member 4 . Also, among the heat rays, the heat rays that are incident on the reflector 3 are transmitted through the back surface of the reflector 3, and among the heat rays that are incident on the light-transmitting member 4, visible light rays are reflected by the light-transmitting member 4 and then reflected. The infrared rays are transmitted through the back surface of the body 3, a portion of which is absorbed by the transparent member 4, and most of the infrared rays are transmitted as is. Then, gas flows into the irradiation device main body 2 from the gas inlet 11 to actively cool the reflector 3 and the light-transmitting member 4. However, due to the wind blocking body 18, the gas inlet 11
Since most of the gas from the lamp 1 can be prevented from directly hitting the tube wall at the lower part of the lamp 1, overcooling of the lower part of the lamp 1 can be prevented. Further, since the wind blocking body 18 transmits at least ultraviolet rays, it hardly blocks ultraviolet rays. Further, outside the irradiation device main body 2, the gas flowing in through the second hole 16 cools the back surface of the reflector 3 and flows out through the third hole 17.

FIG. 3 shows a second embodiment of the invention. Third
Since the figure shows a schematic configuration, it is simplified and other parts than the main parts are omitted. Further, the same parts as in FIG. 1 are given the same reference numerals, and the description thereof will be omitted. This device irradiates light in the horizontal direction, and the device of the first embodiment is rotated, for example, 90 degrees around the high-pressure discharge lamp 1 to facilitate lateral irradiation. There is. The wind control body 30 allows gas from the gas inlet 11 to flow into the lamp 1.
It is arranged at a position connecting the gas inlet 11 and the lamp 1 so as not to hit the lower tube wall directly.

In this case, the gas directly hits the upper tube wall of the lamp 1, but since the upper tube wall of the lamp tends to be too hot,
Rather, it should be cooled by direct gas application. Similarly to the first embodiment, the second embodiment also suppresses overcooling of the lower part of the lamp 1 by using the wind blocking body 30 to prevent a decrease in ultraviolet output.

The gas outflow port and gas inflow port in the irradiation device main body of the present invention are not limited in shape and number as long as they can provide the required cooling effect. For example, as in the third embodiment shown in FIG. 4, the position of the gas inlet 41 in the irradiation device main body 40 is placed above the irradiation opening 43 of the reflector 42, and a plurality of holes are connected to the gas inlet 41. In this case, the baffle body 44 may be divided along the high-pressure discharge lamp 1. In this case, the gas to be introduced into the gas inlet 41 is taken in through a second hole 46 provided on the side surface of the box body 45. In the third embodiment, there is no wind blocking body 44 for the lowest part of the lamp 1, but there is a wind blocking body 44 for the part of the lower part of the lamp 1 that is most exposed to gas, so that supercooling of those parts is achieved. By suppressing this, supercooling of the lowermost portion of the lamp 1 can also be suppressed. A special effect of the third embodiment is that the wind baffle 44 is divided, so that if one of the wind baffles 44 is damaged, the cost of replacing it is reduced. Moreover, since the width of the vertical cross section of each wind baffle body 44 is small, it becomes easier to mold. Furthermore, as in the fourth embodiment shown in FIG. 5, the reflector 51 of the irradiation device main body 50 is made up of a plurality of arc-shaped heat ray transmitting reflectors arranged in series, and the gap between the reflectors is created at that time. The light transmitting member 53 is made by disposing a plurality of flat ultraviolet transmitting members, and the gas is auxiliary flowing out from the light transmitting member gap 54 created at that time. It may be allowed to flow in. 4 and 5, parts other than the main parts are omitted.

The first to fourth embodiments relate to an ultraviolet irradiation device, but the present invention solves the problem that when cooling a reflector and a transparent member, the lower part of a high-pressure discharge lamp is overcooled, resulting in a decrease in light output. It can also be applied to high-pressure discharge lamps such as high-pressure sodium lamps, high-pressure xenon lamps, ultra-high-pressure discharge lamps, and electrodeless high-pressure discharge lamps, including high-pressure discharge lamps that emit visible light as their main light source. Furthermore, it can be applied to various light irradiation devices that have been conventionally used as the irradiation device itself, such as for projectors, exposure, and projection.

FIG. 6 shows a fifth embodiment. The difference from the first embodiment is that the high-pressure discharge lamp 61 is, for example, a high-pressure xenon lamp that emits mainly visible light, and emits mainly visible light, so the reflector 62 only reflects visible light. The shape of the reflector 62, the light transmitting member 63, and the wind control plate 64 is similar to that of the lamp 61 in FIG. The point that it is a hollow rotating body rotated around the tube axis, and the reflector 62 and the light-transmitting member 63 are each a reflector support 65a.
The light-transmitting member support 65b is supported by a light-transmitting member support 65b, and is latched by six latches 66 rotatably attached to the reflector support 65a. However, the ends of the wind baffle body 64 are held between six three iron plate-shaped supports at intervals of 120°. The other ends of these supports 69 are supported by the transparent member support 65b by welding or the like. Incidentally, the reflector 62 of this embodiment is soft glass coated with an optical interference film that reflects visible light and transmits infrared rays, and the transparent member 63 is coated with an optical interference film that transmits visible rays and reflects infrared rays. The wind control body 64 is made of soft glass. In FIG. 6, only the main parts are omitted, and the high-pressure discharge lamp 61 and the irradiation device main body 60 are each held by well-known means. The cooling effect of the fifth embodiment is similar to that of the first embodiment.

FIG. 7 shows a sixth embodiment. The difference from the fifth embodiment is that a high-pressure discharge lamp 61 is provided in the irradiation device main body 70.
However, they are disposed horizontally within the reflector 72, and gas outflow lowers 3 are provided at both ends of the run 161 of the reflector 72. The wind control body 74 is held between six supports similarly to the fifth embodiment. The cooling effect at both ends of the 97161 is higher than that in the fifth embodiment. In FIG. 7, like FIG. 8, other parts than the main parts are omitted.

In addition to the above-described embodiments, the present invention allows various light irradiation devices to be obtained by arbitrarily combining the irradiation device main body, the wind control body, and the high-pressure discharge lamp as necessary.

Furthermore, the shape of the high-pressure discharge lamp may be U-shaped, ring-shaped, or other shapes.

[Effects of the Invention] The present invention provides a light irradiation device that forcibly ventilates gas into an irradiation device body that includes a high-pressure discharge lamp, in which the gas is moved along the lamp so that the gas does not directly hit the tube wall at the bottom of the lamp. By arranging the wind control bodies at a distance from each other, the cooling effect of the required parts such as the reflector and/or transparent member of the irradiation device main body is increased, and the light output is reduced by suppressing overcooling of the lower part of the lamp. It is possible to prevent the decline. In addition, the desired light incident on the wind control body is
Since all or most of the light is transmitted, the desired light can be effectively irradiated onto the irradiated area.

[Brief explanation of the drawing]

Fig. 1 is a partially cutaway perspective view of the first embodiment of the present invention;
The figure is a cross-sectional view taken along the line ■-■- of FIG. 1, FIG.
, 4 is a partially cutaway perspective view showing the main part of the embodiment of the present invention, FIGS. 6 and 7 are sectional views showing the main part of the fifth and sixth embodiments of the present invention, and FIG.
The figure is a sectional view of a conventional example. 1.61. ...High pressure discharge lamp, 2.40,50
,60,70. ...Irradiation device main body, 3.42, 51, 62.72/11 reflector, 4.53,
63,72. ...transparent member, 5.43.・・・
・Irradiation opening, 9.67.73... Gas outlet, 11.41.68... Gas inlet, 13... Forced ventilation device, 18.30, 44, 64.74... Wind control system . Patent Applicant Toshiba Electric Materials Corporation Agent Patent Attorney Ono 1) Yoshihiro 1 Figure 2 Figure 3 Figure 6 Figure 7 Figure 8

Claims (1)

[Claims] (1) A high-pressure discharge lamp; an irradiation device main body having an irradiation opening on the front surface, a reflector containing the high-pressure discharge lamp, and a light-transmitting member disposed to close the irradiation opening; a gas outlet formed in the reflector and disposed on the side or behind the high-pressure discharge lamp; a gas inlet disposed near the side of the irradiation opening; an inflow from the gas inlet; forced ventilation means for causing the gas flowing in from the gas inflow port to flow out from the gas inflow port; separating the gas flowing in from the gas inflow port along the high pressure discharge lamp so as not to directly hit a tube wall at the bottom of the high pressure discharge lamp; A light irradiation device characterized by comprising: a translucent wind control body disposed in a transparent manner;