JPS6371971U - - Google Patents

Info

Publication number
JPS6371971U
JPS6371971U JP16541986U JP16541986U JPS6371971U JP S6371971 U JPS6371971 U JP S6371971U JP 16541986 U JP16541986 U JP 16541986U JP 16541986 U JP16541986 U JP 16541986U JP S6371971 U JPS6371971 U JP S6371971U
Authority
JP
Japan
Prior art keywords
furnace
shielding plate
workpiece
space
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16541986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16541986U priority Critical patent/JPS6371971U/ja
Publication of JPS6371971U publication Critical patent/JPS6371971U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP16541986U 1986-10-28 1986-10-28 Pending JPS6371971U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16541986U JPS6371971U (enrdf_load_stackoverflow) 1986-10-28 1986-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16541986U JPS6371971U (enrdf_load_stackoverflow) 1986-10-28 1986-10-28

Publications (1)

Publication Number Publication Date
JPS6371971U true JPS6371971U (enrdf_load_stackoverflow) 1988-05-13

Family

ID=31095443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16541986U Pending JPS6371971U (enrdf_load_stackoverflow) 1986-10-28 1986-10-28

Country Status (1)

Country Link
JP (1) JPS6371971U (enrdf_load_stackoverflow)

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