JPS6371891U - - Google Patents

Info

Publication number
JPS6371891U
JPS6371891U JP16574286U JP16574286U JPS6371891U JP S6371891 U JPS6371891 U JP S6371891U JP 16574286 U JP16574286 U JP 16574286U JP 16574286 U JP16574286 U JP 16574286U JP S6371891 U JPS6371891 U JP S6371891U
Authority
JP
Japan
Prior art keywords
evaporation chamber
dry cleaning
chamber
cleaning machine
pipe line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16574286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16574286U priority Critical patent/JPS6371891U/ja
Publication of JPS6371891U publication Critical patent/JPS6371891U/ja
Pending legal-status Critical Current

Links

JP16574286U 1986-10-30 1986-10-30 Pending JPS6371891U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16574286U JPS6371891U (enrdf_load_stackoverflow) 1986-10-30 1986-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16574286U JPS6371891U (enrdf_load_stackoverflow) 1986-10-30 1986-10-30

Publications (1)

Publication Number Publication Date
JPS6371891U true JPS6371891U (enrdf_load_stackoverflow) 1988-05-13

Family

ID=31096057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16574286U Pending JPS6371891U (enrdf_load_stackoverflow) 1986-10-30 1986-10-30

Country Status (1)

Country Link
JP (1) JPS6371891U (enrdf_load_stackoverflow)

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