JPS637163U - - Google Patents
Info
- Publication number
- JPS637163U JPS637163U JP10076586U JP10076586U JPS637163U JP S637163 U JPS637163 U JP S637163U JP 10076586 U JP10076586 U JP 10076586U JP 10076586 U JP10076586 U JP 10076586U JP S637163 U JPS637163 U JP S637163U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- film forming
- forming apparatus
- vacuum chamber
- buffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076586U JPH0444613Y2 (https=) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076586U JPH0444613Y2 (https=) | 1986-06-28 | 1986-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637163U true JPS637163U (https=) | 1988-01-18 |
| JPH0444613Y2 JPH0444613Y2 (https=) | 1992-10-21 |
Family
ID=30970893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10076586U Expired JPH0444613Y2 (https=) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444613Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01294598A (ja) * | 1988-05-23 | 1989-11-28 | Sumitomo Electric Ind Ltd | 気相成長装置 |
| JPH08958U (ja) * | 1995-12-21 | 1996-06-11 | アネルバ株式会社 | スパッタリング装置 |
-
1986
- 1986-06-28 JP JP10076586U patent/JPH0444613Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01294598A (ja) * | 1988-05-23 | 1989-11-28 | Sumitomo Electric Ind Ltd | 気相成長装置 |
| JPH08958U (ja) * | 1995-12-21 | 1996-06-11 | アネルバ株式会社 | スパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444613Y2 (https=) | 1992-10-21 |