JPS6370737U - - Google Patents
Info
- Publication number
- JPS6370737U JPS6370737U JP16491786U JP16491786U JPS6370737U JP S6370737 U JPS6370737 U JP S6370737U JP 16491786 U JP16491786 U JP 16491786U JP 16491786 U JP16491786 U JP 16491786U JP S6370737 U JPS6370737 U JP S6370737U
- Authority
- JP
- Japan
- Prior art keywords
- compressed air
- light receiving
- light
- photoelectric switch
- receiving part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims 1
Landscapes
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16491786U JPS6370737U (en, 2012) | 1986-10-29 | 1986-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16491786U JPS6370737U (en, 2012) | 1986-10-29 | 1986-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370737U true JPS6370737U (en, 2012) | 1988-05-12 |
Family
ID=31094475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16491786U Pending JPS6370737U (en, 2012) | 1986-10-29 | 1986-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370737U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023067145A (ja) * | 2021-10-29 | 2023-05-16 | 東京エレクトロン株式会社 | 基板処理装置、および動作状態監視方法 |
-
1986
- 1986-10-29 JP JP16491786U patent/JPS6370737U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023067145A (ja) * | 2021-10-29 | 2023-05-16 | 東京エレクトロン株式会社 | 基板処理装置、および動作状態監視方法 |