JPS6370296U - - Google Patents

Info

Publication number
JPS6370296U
JPS6370296U JP16415986U JP16415986U JPS6370296U JP S6370296 U JPS6370296 U JP S6370296U JP 16415986 U JP16415986 U JP 16415986U JP 16415986 U JP16415986 U JP 16415986U JP S6370296 U JPS6370296 U JP S6370296U
Authority
JP
Japan
Prior art keywords
electrostrictive element
supported
laminated
axial direction
laminated electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16415986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051992Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986164159U priority Critical patent/JPH051992Y2/ja
Publication of JPS6370296U publication Critical patent/JPS6370296U/ja
Application granted granted Critical
Publication of JPH051992Y2 publication Critical patent/JPH051992Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP1986164159U 1986-10-23 1986-10-23 Expired - Lifetime JPH051992Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (US20100056889A1-20100304-C00004.png) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (US20100056889A1-20100304-C00004.png) 1986-10-23 1986-10-23

Publications (2)

Publication Number Publication Date
JPS6370296U true JPS6370296U (US20100056889A1-20100304-C00004.png) 1988-05-11
JPH051992Y2 JPH051992Y2 (US20100056889A1-20100304-C00004.png) 1993-01-19

Family

ID=31093019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986164159U Expired - Lifetime JPH051992Y2 (US20100056889A1-20100304-C00004.png) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPH051992Y2 (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430481A (ja) * 1990-05-28 1992-02-03 Nec Corp 圧電アクチュエータの駆動方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449093A (en) * 1977-09-26 1979-04-18 Nec Corp Piezoelectric actuator
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密xy移動装置
JPS6059981A (ja) * 1983-09-09 1985-04-06 Asahi Okuma Ind Co Ltd 駆動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449093A (en) * 1977-09-26 1979-04-18 Nec Corp Piezoelectric actuator
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密xy移動装置
JPS6059981A (ja) * 1983-09-09 1985-04-06 Asahi Okuma Ind Co Ltd 駆動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430481A (ja) * 1990-05-28 1992-02-03 Nec Corp 圧電アクチュエータの駆動方法

Also Published As

Publication number Publication date
JPH051992Y2 (US20100056889A1-20100304-C00004.png) 1993-01-19

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