JPS6370151U - - Google Patents
Info
- Publication number
- JPS6370151U JPS6370151U JP16522286U JP16522286U JPS6370151U JP S6370151 U JPS6370151 U JP S6370151U JP 16522286 U JP16522286 U JP 16522286U JP 16522286 U JP16522286 U JP 16522286U JP S6370151 U JPS6370151 U JP S6370151U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wall
- recess
- circumference
- contacting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011179 visual inspection Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16522286U JPS6370151U (OSRAM) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16522286U JPS6370151U (OSRAM) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370151U true JPS6370151U (OSRAM) | 1988-05-11 |
Family
ID=31095061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16522286U Pending JPS6370151U (OSRAM) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370151U (OSRAM) |
-
1986
- 1986-10-27 JP JP16522286U patent/JPS6370151U/ja active Pending
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