JPS6370092U - - Google Patents

Info

Publication number
JPS6370092U
JPS6370092U JP16418886U JP16418886U JPS6370092U JP S6370092 U JPS6370092 U JP S6370092U JP 16418886 U JP16418886 U JP 16418886U JP 16418886 U JP16418886 U JP 16418886U JP S6370092 U JPS6370092 U JP S6370092U
Authority
JP
Japan
Prior art keywords
viewing window
screen
chamber
detection device
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16418886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518713Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16418886U priority Critical patent/JPH0518713Y2/ja
Publication of JPS6370092U publication Critical patent/JPS6370092U/ja
Application granted granted Critical
Publication of JPH0518713Y2 publication Critical patent/JPH0518713Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Particle Accelerators (AREA)
JP16418886U 1986-10-28 1986-10-28 Expired - Lifetime JPH0518713Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16418886U JPH0518713Y2 (https=) 1986-10-28 1986-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16418886U JPH0518713Y2 (https=) 1986-10-28 1986-10-28

Publications (2)

Publication Number Publication Date
JPS6370092U true JPS6370092U (https=) 1988-05-11
JPH0518713Y2 JPH0518713Y2 (https=) 1993-05-18

Family

ID=31093076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16418886U Expired - Lifetime JPH0518713Y2 (https=) 1986-10-28 1986-10-28

Country Status (1)

Country Link
JP (1) JPH0518713Y2 (https=)

Also Published As

Publication number Publication date
JPH0518713Y2 (https=) 1993-05-18

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