JPS6370020U - - Google Patents

Info

Publication number
JPS6370020U
JPS6370020U JP16544586U JP16544586U JPS6370020U JP S6370020 U JPS6370020 U JP S6370020U JP 16544586 U JP16544586 U JP 16544586U JP 16544586 U JP16544586 U JP 16544586U JP S6370020 U JPS6370020 U JP S6370020U
Authority
JP
Japan
Prior art keywords
phase
sensing element
magnetic sensing
detecting
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16544586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16544586U priority Critical patent/JPS6370020U/ja
Publication of JPS6370020U publication Critical patent/JPS6370020U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP16544586U 1986-10-27 1986-10-27 Pending JPS6370020U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16544586U JPS6370020U (US06818201-20041116-C00086.png) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16544586U JPS6370020U (US06818201-20041116-C00086.png) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6370020U true JPS6370020U (US06818201-20041116-C00086.png) 1988-05-11

Family

ID=31095491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16544586U Pending JPS6370020U (US06818201-20041116-C00086.png) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6370020U (US06818201-20041116-C00086.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018179745A (ja) * 2017-04-13 2018-11-15 株式会社ニコン 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018179745A (ja) * 2017-04-13 2018-11-15 株式会社ニコン 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置

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