JPS6370011U - - Google Patents

Info

Publication number
JPS6370011U
JPS6370011U JP16441786U JP16441786U JPS6370011U JP S6370011 U JPS6370011 U JP S6370011U JP 16441786 U JP16441786 U JP 16441786U JP 16441786 U JP16441786 U JP 16441786U JP S6370011 U JPS6370011 U JP S6370011U
Authority
JP
Japan
Prior art keywords
reference mirror
beam splitter
mirror
measurement surface
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16441786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16441786U priority Critical patent/JPS6370011U/ja
Publication of JPS6370011U publication Critical patent/JPS6370011U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP16441786U 1986-10-27 1986-10-27 Pending JPS6370011U (US20020193084A1-20021219-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16441786U JPS6370011U (US20020193084A1-20021219-M00002.png) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16441786U JPS6370011U (US20020193084A1-20021219-M00002.png) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6370011U true JPS6370011U (US20020193084A1-20021219-M00002.png) 1988-05-11

Family

ID=31093516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16441786U Pending JPS6370011U (US20020193084A1-20021219-M00002.png) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6370011U (US20020193084A1-20021219-M00002.png)

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