JPS6369160U - - Google Patents

Info

Publication number
JPS6369160U
JPS6369160U JP16172686U JP16172686U JPS6369160U JP S6369160 U JPS6369160 U JP S6369160U JP 16172686 U JP16172686 U JP 16172686U JP 16172686 U JP16172686 U JP 16172686U JP S6369160 U JPS6369160 U JP S6369160U
Authority
JP
Japan
Prior art keywords
etching
turntable
substrate
etched
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16172686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336046Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16172686U priority Critical patent/JPS6336046Y2/ja
Publication of JPS6369160U publication Critical patent/JPS6369160U/ja
Application granted granted Critical
Publication of JPS6336046Y2 publication Critical patent/JPS6336046Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP16172686U 1986-10-22 1986-10-22 Expired JPS6336046Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16172686U JPS6336046Y2 (cg-RX-API-DMAC7.html) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16172686U JPS6336046Y2 (cg-RX-API-DMAC7.html) 1986-10-22 1986-10-22

Publications (2)

Publication Number Publication Date
JPS6369160U true JPS6369160U (cg-RX-API-DMAC7.html) 1988-05-10
JPS6336046Y2 JPS6336046Y2 (cg-RX-API-DMAC7.html) 1988-09-26

Family

ID=31088309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16172686U Expired JPS6336046Y2 (cg-RX-API-DMAC7.html) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS6336046Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6336046Y2 (cg-RX-API-DMAC7.html) 1988-09-26

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