JPS6368206U - - Google Patents

Info

Publication number
JPS6368206U
JPS6368206U JP16272186U JP16272186U JPS6368206U JP S6368206 U JPS6368206 U JP S6368206U JP 16272186 U JP16272186 U JP 16272186U JP 16272186 U JP16272186 U JP 16272186U JP S6368206 U JPS6368206 U JP S6368206U
Authority
JP
Japan
Prior art keywords
cavity
walled
thick
thin
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16272186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16272186U priority Critical patent/JPS6368206U/ja
Publication of JPS6368206U publication Critical patent/JPS6368206U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Motors That Do Not Use Commutators (AREA)
JP16272186U 1986-10-23 1986-10-23 Pending JPS6368206U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16272186U JPS6368206U (zh) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16272186U JPS6368206U (zh) 1986-10-23 1986-10-23

Publications (1)

Publication Number Publication Date
JPS6368206U true JPS6368206U (zh) 1988-05-09

Family

ID=31090254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16272186U Pending JPS6368206U (zh) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPS6368206U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012531122A (ja) * 2009-06-19 2012-12-06 クアルコム,インコーポレイテッド キャビティ内の調整可能なmems共振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012531122A (ja) * 2009-06-19 2012-12-06 クアルコム,インコーポレイテッド キャビティ内の調整可能なmems共振器
US8981875B2 (en) 2009-06-19 2015-03-17 Qualcomm Incorporated Tunable MEMS resonators

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