JPS6368206U - - Google Patents
Info
- Publication number
- JPS6368206U JPS6368206U JP16272186U JP16272186U JPS6368206U JP S6368206 U JPS6368206 U JP S6368206U JP 16272186 U JP16272186 U JP 16272186U JP 16272186 U JP16272186 U JP 16272186U JP S6368206 U JPS6368206 U JP S6368206U
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- walled
- thick
- thin
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Control Of Motors That Do Not Use Commutators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16272186U JPS6368206U (en:Method) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16272186U JPS6368206U (en:Method) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6368206U true JPS6368206U (en:Method) | 1988-05-09 |
Family
ID=31090254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16272186U Pending JPS6368206U (en:Method) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6368206U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012531122A (ja) * | 2009-06-19 | 2012-12-06 | クアルコム，インコーポレイテッド | キャビティ内の調整可能なｍｅｍｓ共振器 |
-
1986
- 1986-10-23 JP JP16272186U patent/JPS6368206U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012531122A (ja) * | 2009-06-19 | 2012-12-06 | クアルコム，インコーポレイテッド | キャビティ内の調整可能なｍｅｍｓ共振器 |
| US8981875B2 (en) | 2009-06-19 | 2015-03-17 | Qualcomm Incorporated | Tunable MEMS resonators |