JPS6367980U - - Google Patents
Info
- Publication number
- JPS6367980U JPS6367980U JP16280186U JP16280186U JPS6367980U JP S6367980 U JPS6367980 U JP S6367980U JP 16280186 U JP16280186 U JP 16280186U JP 16280186 U JP16280186 U JP 16280186U JP S6367980 U JPS6367980 U JP S6367980U
- Authority
- JP
- Japan
- Prior art keywords
- burn
- semiconductor
- furnace
- static eliminator
- low humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280186U JPS6367980U (de) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280186U JPS6367980U (de) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367980U true JPS6367980U (de) | 1988-05-07 |
Family
ID=31090408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16280186U Pending JPS6367980U (de) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367980U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06104321A (ja) * | 1991-03-26 | 1994-04-15 | Erich Reitinger | 半導体ウエハー等のテスト装置 |
-
1986
- 1986-10-22 JP JP16280186U patent/JPS6367980U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06104321A (ja) * | 1991-03-26 | 1994-04-15 | Erich Reitinger | 半導体ウエハー等のテスト装置 |
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