JPS6367857U - - Google Patents
Info
- Publication number
- JPS6367857U JPS6367857U JP16029086U JP16029086U JPS6367857U JP S6367857 U JPS6367857 U JP S6367857U JP 16029086 U JP16029086 U JP 16029086U JP 16029086 U JP16029086 U JP 16029086U JP S6367857 U JPS6367857 U JP S6367857U
- Authority
- JP
- Japan
- Prior art keywords
- contamination
- electrodes
- detection
- electrode plate
- input terminals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16029086U JPS6367857U (pl) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16029086U JPS6367857U (pl) | 1986-10-20 | 1986-10-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6367857U true JPS6367857U (pl) | 1988-05-07 |
Family
ID=31085533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16029086U Pending JPS6367857U (pl) | 1986-10-20 | 1986-10-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6367857U (pl) |
-
1986
- 1986-10-20 JP JP16029086U patent/JPS6367857U/ja active Pending