JPS6367834U - - Google Patents

Info

Publication number
JPS6367834U
JPS6367834U JP16070486U JP16070486U JPS6367834U JP S6367834 U JPS6367834 U JP S6367834U JP 16070486 U JP16070486 U JP 16070486U JP 16070486 U JP16070486 U JP 16070486U JP S6367834 U JPS6367834 U JP S6367834U
Authority
JP
Japan
Prior art keywords
thermocouple
straight rod
face
resistant adhesive
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16070486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16070486U priority Critical patent/JPS6367834U/ja
Publication of JPS6367834U publication Critical patent/JPS6367834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP16070486U 1986-10-20 1986-10-20 Pending JPS6367834U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16070486U JPS6367834U (US20100223739A1-20100909-C00005.png) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16070486U JPS6367834U (US20100223739A1-20100909-C00005.png) 1986-10-20 1986-10-20

Publications (1)

Publication Number Publication Date
JPS6367834U true JPS6367834U (US20100223739A1-20100909-C00005.png) 1988-05-07

Family

ID=31086331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16070486U Pending JPS6367834U (US20100223739A1-20100909-C00005.png) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPS6367834U (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013036977A (ja) * 2011-07-13 2013-02-21 Hitachi Kokusai Electric Inc 温度検出装置、基板処理装置、及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013036977A (ja) * 2011-07-13 2013-02-21 Hitachi Kokusai Electric Inc 温度検出装置、基板処理装置、及び半導体装置の製造方法

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