JPS6367243U - - Google Patents

Info

Publication number

JPS6367243U

JPS6367243U JP16138586U JP16138586U JPS6367243U JP S6367243 U JPS6367243 U JP S6367243U JP 16138586 U JP16138586 U JP 16138586U JP 16138586 U JP16138586 U JP 16138586U JP S6367243 U JPS6367243 U JP S6367243U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

cleaning position

wafer

sterilizing

brush

Prior art date

1986-10-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 230000001954 sterilising effect Effects 0.000 claims description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• 238000004140 cleaning Methods 0.000 claims 3
• 241000894006 Bacteria Species 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 238000005201 scrubbing Methods 0.000 description 2
• 238000004659 sterilization and disinfection Methods 0.000 description 1

Cited By (1)