JPS6367240U - - Google Patents
Info
- Publication number
- JPS6367240U JPS6367240U JP16189586U JP16189586U JPS6367240U JP S6367240 U JPS6367240 U JP S6367240U JP 16189586 U JP16189586 U JP 16189586U JP 16189586 U JP16189586 U JP 16189586U JP S6367240 U JPS6367240 U JP S6367240U
- Authority
- JP
- Japan
- Prior art keywords
- mounting table
- temperature controller
- wafer
- region
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16189586U JPS6367240U (enExample) | 1986-10-21 | 1986-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16189586U JPS6367240U (enExample) | 1986-10-21 | 1986-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367240U true JPS6367240U (enExample) | 1988-05-06 |
Family
ID=31088639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16189586U Pending JPS6367240U (enExample) | 1986-10-21 | 1986-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367240U (enExample) |
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1986
- 1986-10-21 JP JP16189586U patent/JPS6367240U/ja active Pending