JPS6366845U - - Google Patents

Info

Publication number

JPS6366845U

JPS6366845U JP1986160964U JP16096486U JPS6366845U JP S6366845 U JPS6366845 U JP S6366845U JP 1986160964 U JP1986160964 U JP 1986160964U JP 16096486 U JP16096486 U JP 16096486U JP S6366845 U JPS6366845 U JP S6366845U

Authority

JP

Japan

Prior art keywords

optical mask

substrate

light

central portion

shielding film

Prior art date

1986-10-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 239000002184 metal Substances 0.000 claims description 5
• 230000003287 optical effect Effects 0.000 claims description 4
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 239000002356 single layer Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 description 4
• 239000011521 glass Substances 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1